Arc blade-shaped processing surface structure of pad conditioner and manufacturing mold structure thereof
OwnerHuang-Nan Huang, Cheng-Fang Leeinventors
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OwnerHuang-Nan Huang, Cheng-Fang Leeinventors
Estimating the term…
An arc blade-shaped processing surface structure of a pad conditioner includes an outer frame, a combining layer and a plurality of polishing particles. The polishing particles are disposed on a surface of the combining layer, and the combining layer has a first region and a second region sequentially arrange from the center to the outside of the combining layer, and the second region has a plurality of arc-shaped protrusions arranged separately from one another and disposed around the external periphery of the first region, and the protrusions arranged in order and separated with an interval apart from each other can be used to provide an appropriate space for extension and rebound for a polished surface material to obtain a definite and uniform polishing effect.
An arc blade-shaped processing surface structure of a pad conditioner, for polishing and processing a surface of a polishing pad by a rotating method, comprising:
Dependencies are inferred from the claim text.