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US 2013/0171802 A1Published application
Full wafer processing by multiple passes through a combinatorial reactor
AssigneeIntermolecular, Inc.
InventorsRajesh Kelekar, Aaron T. Francis, Gregory P. Lim
Life of this patent
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Abstract
Overlapping combinatorial processing can offer more processed regions, better particle performance and simpler process equipment. In overlapping combinatorial processing, one or more regions are processed in series with some degrees of overlapping between regions. In some embodiments, overlapping combinatorial processing can be used in conjunction with non-overlapping combinatorial processing and non-combinatorial processing to develop and investigate materials and processes for device processing and manufacturing.
Claims20
A method comprising:
- processing a substrate through multiple processing steps in a sequential manner;
- wherein each processing step processes a plurality of site isolated regions on a surface of the substrate in a combinatorial manner;
- and
- wherein the site isolated regions of a processing step are at least contiguous with the site isolated regions of another processing step.
1 more element
A method comprising:
- processing a substrate through multiple processing steps in a sequential manner;
- wherein one or more processing steps processes the substrate in a conventional manner;
- wherein two or more processing steps processes the multiple site isolated regions on a surface of the substrate in a combinatorial manner;
- and
- wherein the site isolated regions of a processing step are at least contiguous with the site isolated regions of another processing step.
2 more elements
Dependencies are inferred from the claim text.