Current steering element and non-volatile memory element incorporating current steering element

A method of manufacturing a current steering element comprising the steps of:

• forming a lower wire;
• forming a first electrode layer such that the first electrode layer is electrically connected to the lower wire;
• forming a current steering layer on the first electrode layer such that the current steering layer physically contacts the first electrode layer;
• forming a second electrode layer on the current steering layer such that the second electrode layer physically contacts the current steering layer;
• forming a corrosion-suppressing layer on the second electrode layer using a material having a higher standard electrode potential than a material of the second electrode layer;
• forming an interlayer insulating layer such that the interlayer insulating layer covers the corrosion-suppressing layer, the second electrode layer, the current steering layer and the first electrode layer;
• forming a trench in the interlayer insulating layer such that the corrosion-suppressing layer is exposed and the second electrode layer is not exposed in a lower opening of the trench;
• and
• washing an interior of the trench using a washing liquid containing water.