Method for manufacturing silicon carbide semiconductor device

A method for manufacturing a silicon carbide semiconductor device, comprising the steps of:

• forming a drift layer on a single-crystal substrate, said drift layer having a first surface facing said single-crystal substrate and a second surface opposite to said first surface, said drift layer being made of silicon carbide and having first conductivity type;
• forming a collector layer on said second surface of said drift layer, said collector layer being made of silicon carbide and having second conductivity type;
• exposing said first surface of said drift layer by removing said single-crystal substrate;
• forming a body region and an emitter region, said body region being disposed in said first surface of said drift layer and having the second conductivity type different from said first conductivity type, said emitter region being disposed on said body region, being separated from said drift layer by said body region, and having said first conductivity type;
• forming a gate insulating film on said body region so as to connect said drift layer and said emitter region to each other;
• forming a gate electrode on said gate insulating film;
• and
• forming an emitter electrode in contact with each of said emitter region and said body region.