Method for producing solar cell and film-producing device
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsRyo Mitta, Mitsuhito Takahashi, Hiroshi Hashigami, Takashi Murakami, Shintarou Tsukigata, Takenori Watabe, Hiroyuki Otsuka
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Abstract
Disclosed in a method that is for producing a solar cell and that is characterized by performing an annealing step on a semiconductor substrate before an electrode-forming step. By means of performing annealing in the above manner, it is possible to improve the electrical characteristics of the solar cell without negatively impacting reliability or outward appearance. As a result, the method can be widely used in methods for producing solar cells having high reliability and electrical characteristics.
Claims10
A method for producing a solar cell, comprising the steps of:
- forming an antireflection/passivation film on a semiconductor substrate,
- annealing the substrate, and
- then forming electrodes on the substrate.
A film-forming apparatus comprising means for forming a passivation film and a heating chamber where anneal is carried out subsequent to formation of the passivation film.
Dependencies are inferred from the claim text.