Progressive-refractivity antireflection layer and method for fabricating the same
AssigneeTaiwan Micropaq Corporation
InventorJIN SHIAN WANG
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Abstract
The present invention discloses a progressive-refractivity antireflection layer and a method for fabricating the same to eliminate light reflection occurring in an interface. The present invention is characterized in being fabricated via depositing a first material and a second material, and having a refractivity (neff) gradually varying with a thickness thereof and ranging between a refractivity (n1) of the first material and a refractivity (n2) of the second material. No matter at what thickness the refractivity (neff) of the antireflection layer is measured, the refractivity (neff) meets an effective medium theory expressed by an equation: neff={n12f+n22(1−f)}1/2, wherein f is a filling ratio of the first material of the antireflection layer.
Claims14
A method for fabricating a progressive-refractivity antireflection layer, comprising steps:
- providing a vacuum chamber, wherein said vacuum chamber has a first target, a second target, and a substrate, and wherein said first target is connected with a first cathode and a first programmable electric power source, and wherein said second target is connected with a second cathode and a second programmable electric power source, and wherein said substrate is connected with an anode;
- filling argon and oxygen into said vacuum chamber to generate plasma beams bombarding said first target and said second target;
- and
- synchronously adjusting said first programmable electric power source and said second programmable electric power source to regulate powers for said first target and said second target and modify a ratio of said plasma beams bombarding said first target and said second target, and depositing on said substrate an antireflection layer having a refractivity gradually varying with a thickness thereof and ranging between a refractivity (n1) of an oxide of said first target and a refractivity (n2) of an oxide of said second target.
Dependencies are inferred from the claim text.