Drawing apparatus, and method of manufacturing article

A method of manufacturing an article, the method comprising:

• performing drawing on a substrate using a drawing apparatus;
• developing the substrate on which the drawing has been performed;
• and
• processing the developed substrate to manufacture the article,
• wherein the drawing apparatus performs drawing on the substrate with a charged particle beam, the apparatus including
• a stage having a reference mark, and configured to hold the substrate and to be moved;
• a charged particle optical system configured to emit the charged particle beam to the substrate;
• a first measuring device having an optical axis spaced apart from an axis of the charged particle optical system by a first distance and configured to measure a position of an alignment mark formed on the substrate;
• a second measuring device having an optical axis spaced apart from the axis of the charged particle optical system by a second distance shorter than the first distance and configured to measure a position of the reference mark;
• and
• a processor configured to obtain a baseline of the first measuring device based on positions of the reference mark respectively measured by the first measuring device and the second measuring device via movement of the stage, and a baseline of the second measuring device.