Additive for resist and resist composition comprising same

A resist additive represented by Formula 1 below:

• wherein R′, R″ and R′″ are each independently selected from the group consisting of a hydrogen atom, a C1-C4 alkyl group, a halogen group, and a C1-C4 haloalkyl group in which one hydrogen atom is substituted with a halogen group;
• R1 and R2 are each independently a hydrogen atom or a C1-C8 alkyl group;
• R3 is a hydrogen atom or a functional group represented by Formula 2 below:
• wherein R31 is a hydrogen atom, or a hydroxyl protecting group selected from the group consisting of a C1-C20 alkyl group, a (C1-C20 alkoxy)alkyl group, a C3-C30 cycloalkyl group, a formyl group, a (C1-C20 alkyl)carbonyl group, a (C3-C30 cycloalkyl)carbonyl group, a (C1-C20 alkyl)carboxyl group, and a (C3-C30 cycloalkyl)carboxyl group, R32 is selected from the group consisting of a C1-C20 alkanediyl group, a C2-C20 alkenediyl group, a C1-C20 heteroalkanediyl group, a C2-C20 heteroalkenediyl group, a C3-C30 cycloalkanediyl group, a C3-C30 cycloalkenediyl group, a C2-C30 heterocycloalkanediyl group, and a C3-C30 heterocycloalkanediyl group, and R33 is an acid labile group selected from the group consisting of
• wherein Ra, Rb, Rc and Rd are each independently selected from the group consisting of a C1-C20 alkyl group, a C3-C30 cycloalkyl group, a (C1-C10 alkyl)cycloalkyl group, a hydroxyalkyl group, a C1-C20 alkoxy group, a (C1-C10 alkoxy)alkyl group, an acetyl group, an acetylalkyl group, a carboxyl group, a (C1-C10 alkyl)carboxyl group, a (C3-C18 cycloalkyl)carboxyl group, and a C3-C30 heterocycloalkyl group or fused together between adjacent groups to form a C3-C30 saturated or unsaturated hydrocarbon ring or a C2-C20 heterocyclic group, p is an integer of 0 to 3, and q is an integer of 0 to 10;
• R4 is selected from the group consisting of a hydrophobic group, and a C1-C20 alkyl group, a C3-C30 cycloalkyl group, an acyl group, a carboxyl group, a (C1-C20 alkyl)carboxyl group, a (C3-C30 cycloalkyl)carboxyl group, a C1-C20 heteroalkyl group, and a C2-C30 heterocycloalkyl group comprising the hydrophobic group;
• R5 is an acid labile group selected from the group consisting of
• wherein Ra, Rb, Rc and Rd are each independently selected from the group consisting of a C1-C20 alkyl group, a C3-C30 cycloalkyl group, a (C1-C10 alkyl)cycloalkyl group, a hydroxyalkyl group, a C1-C20 alkoxy group, a (C1-C10 alkoxy)alkyl group, an acetyl group, an acetylalkyl group, a carboxyl group, a (C1-C10 alkyl)carboxyl group, a (C3-C18 cycloalkyl)carboxyl group, and a C3-C30 heterocycloalkyl group or fused together between adjacent groups to form a C3-C30 saturated or unsaturated hydrocarbon ring or a C2-C20 heterocyclic group, p is an integer of 0 to 3, and q is an integer of 0 to 10, or selected from the group consisting of a C1-C20 alkyl group, a C3-C30 cycloalkyl group, an acyl group, a carboxyl group, a (C1-C20 alkyl)carboxyl group, a (C3-C30 cycloalkyl)carboxyl group, a (C1-C20 alkyl)carboxyalkyl group, a C1-C20 heteroalkyl group, and a C2-C30 heterocycloalkyl group comprising the acid labile group;
• and
• l, m, n and o are respectively numbers of the repeat units in a backbone, wherein l+m+n+o=1, 0<l/(l+m+n+o)<0.9, 0<m/(l+m+n+o)≦0.2, 0<n/(l+m+n+o)<0.9, and 0≦o/(l+m+n+o)<0.9.