Hard coating layer and method for forming the same
AssigneeResearch Institute of Industrial Science & Technology
InventorsJi-Hoon YANG, Jae-In Jeong
Life of this patent
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Abstract
The present invention relates to hard coating layer and a method for forming the hard coating layer. A method for forming hard coating layer which comprises: washing a substrate; installing the washed substrate in a vacuum equipment, and vacuating the chamber of the vacuum equipment; cleaning the substrate; forming oblique coating layer on the substrate; and forming vertical coating layer, vertically to the substrate, on the oblique coating layer by applying bias-voltage after forming oblique coating layer is provided. According to present invention, hardness of coating layer may be enhanced by forming a oblique coating layer and vertical coating layer on a substrate.
Claims15
A method for forming hard coating layer which comprises:
- washing a substrate;
- installing the washed substrate in a vacuum equipment, and vacuating the chamber of the vacuum equipment;
- cleaning the substrate;
- forming oblique coating layer on the substrate;
- and
- forming vertical coating layer, vertically to the substrate, on the oblique coating layer by applying bias-voltage after forming oblique coating layer.
Hard coating layers that comprise of an oblique coating layer formed obliquely on a substrate and a vertical coating layer formed, vertically to the substrate, on the oblique coating layer.
Dependencies are inferred from the claim text.