Method of forming a nano-structure

A method of forming a nano-structure (100, 100′), comprising:

• forming a multi-layered structure (10) including i) an oxidizable material layer (14) established on a substrate (12), and ii) an other oxidizable material layer (16) established on the oxidizable material layer (14), the oxidizable material layer (14) being formed of an oxidizable material having an expansion coefficient, during oxidation, that is more than 1;
• forming a template (16′) out of the other oxidizable material layer (16), the template (16′) including a plurality of pores (18) defined therein;
• growing an oxide structure (14′) from the oxidizable material layer (14) through each of the plurality of pores (18) and over a surface of the template (16′), wherein the growing of the oxide structure (14′) includes forming an individual nano-pillar (20) inside each of the plurality of pores (18) that are oriented in a position that is substantially normal to the substrate (12), and wherein the growing of the oxide structure 14′) over the surface of the template (16′) includes merging respective ends (21) of the individual nano-pillars (20) to form a substantially continuous cap layer (22, 22′);
• and
• selectively removing the template (16′) to expose the plurality of nano-pillars (20).