Production method for an sic volume monocrystal with a homogeneous lattice plane course and a monocrystalline sic substrate with a homogeneous lattice plane course

A method for producing an SiC volume monocrystal by sublimation growth, which comprises the steps of:

• disposing an SiC seed crystal in a crystal growth region of a growth crucible before a beginning of a growth process;
• introducing a powdery SiC source material into an SiC storage region of the growth crucible;
• producing an SiC growth gas phase during the growth process by means of sublimation of the powdery SiC source material and by of transport of sublimated gaseous components into the crystal growth region, and the SiC volume monocrystal having a central center longitudinal axis grows by means of deposition from the SiC growth gas phase on the SiC seed crystal;
• substantially heating the SiC seed crystal without bending during a heating phase before the beginning of the growth process, so that an SiC crystal structure with a substantially homogeneous course of lattice planes is provided in the SiC seed crystal, wherein the lattice planes have an angle of inclination at every point relative to a direction of the center longitudinal axis, and peripheral angles of inclination at a radial edge of the SiC seed crystal differ with respect to amount by less than 0.05° from a central angle of inclination at a site of the central center longitudinal axis;
• and
• propagating the SiC crystal structure with the substantially homogeneous course of lattice planes during the growth process of the SiC seed crystal into the growing SiC volume monocrystal.