Magnetic flux channel coupled plasma reactor
OwnerDae-Kyu CHOIinventor
Life of this patent
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Abstract
A magnetic flux channel coupled plasma reactor includes a hollow reactor body having a plasma discharge space coupled to magnetic flux channels, a magnetic flux channel coupled plasma source including magnetic cores having two or more magnetic flux entrances forming the magnetic channel and primary winding coils wound in the magnetic cores and generating magnetic flux channel coupled plasma in the plasma discharge space, and an AC switching power supply for supplying plasma generation power to the primary winding coils and the capacitively coupled electrodes. The magnetic flux channel coupled plasma reactor independently generates the magnetic flux channel coupled plasma or hybrid plasma through capacitively coupled electrodes or inductive antenna coils in the inside of the reactor body.
Claims21
A magnetic flux channel coupled plasma reactor comprising:
- a hollow reactor body having a plasma discharge space coupled to magnetic flux channels;
- a magnetic flux channel coupled plasma source including magnetic cores having two or more magnetic flux entrances forming the magnetic channel and primary winding coils wound in the magnetic cores and generating magnetic flux channel coupled plasma in the plasma discharge space;
- capacitively coupled electrodes capacitively coupled while the plasma discharge space is interposed therebetween to generate capacitively coupled plasma in the plasma discharge space;
- and
- an AC switching power supply for supplying plasma generation power to the primary winding coils and the capacitively coupled electrodes.
A magnetic flux channel coupled plasma reactor comprising:
- a hollow reactor body having a plasma discharge space coupled to magnetic flux channels;
- a magnetic flux channel coupled plasma source including magnetic cores having two or more magnetic flux entrances forming the magnetic channel and primary winding coils wound in the magnetic cores and generating magnetic flux channel coupled plasma in the plasma discharge space;
- an inductively coupled plasma source including inductive antenna coils mounted in the reactor body so as to form inductively coupled plasma in the plasma discharge space;
- and
- an AC switching power supply for supplying plasma generation power to the primary winding coils and the inductive antenna coils.
A magnetic flux channel coupled plasma reactor comprising:
- a hollow reactor body having a plasma discharge space coupled to magnetic flux channels;
- a conductive reactor body cover surrounding an outside of the reactor body and having a magnetic flux entrance opening;
- a magnetic flux channel coupled plasma source including magnetic cores having two or more magnetic flux entrances forming the magnetic channel and primary winding coils wound in the magnetic cores and generating magnetic flux channel coupled plasma in the plasma discharge space;
- and
- an AC switching power supply for supplying plasma generation power to the primary winding coils and capacitively coupled electrodes.
A magnetic flux channel coupled plasma reactor comprising:
- a hollow reactor body having a plasma discharge space coupled to magnetic flux channels;
- an internal conductive cover installed in an inside of the reactor body and including a magnetic flux opening;
- a magnetic flux channel coupled plasma source having magnetic cores having two or more magnetic flux entrances forming the magnetic channel and primary winding coils wound in the magnetic cores and generating magnetic flux channel coupled plasma in the plasma discharge space;
- and
- an AC switching power supply for generating plasma generation power to the primary winding coils and capacitively coupled electrodes.
Dependencies are inferred from the claim text.