Method for creating template for patternmatching, and image processing apparatus

An image processing apparatus comprising a template creating section that creates a template for template matching based on selection of a partial region of design data,

• the image processing apparatus comprising an edge density calculating section that calculates an edge density of edges that belong to a predetermined region in the design data equivalent to a region to be searched for in the template matching.

A computer program for causing a computing apparatus to create a template for template matching based on selection of a partial region of design data,

• the computer program causing the computing apparatus to compute an edge density of edges that belong to a predetermined region in the design data equivalent to a region to be searched for in the template matching.

An image processing apparatus that creates a template for template matching from design data,

• the image processing apparatus comprising a grayscale information creating section that uses design data and process information related to a manufacturing process to obtain grayscale information of each position in the template.

An image processing apparatus comprising a template creating section that creates a template for template matching based on selection of a partial region of design data, wherein

• the template creating section creates the template by applying image processing to a plurality of regions included in the partial region of the design data according to a formation state of a pattern.

A computer program for causing a computing apparatus to create a template for template matching based on selection of a partial region of design data,

• the computer program causing the computing apparatus to create the template by applying image processing to a plurality of regions included in the partial region of the design data according to a formation state of a pattern.