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US 2013/0170624 A1Published application
Focal track of a rotating anode having a microstructure
AssigneeSiemens Aktiengesellschaft
InventorsJörg Freudenberger, Stefan Lampenscherf, Wolfgang Schäff, Steffen Walter
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Abstract
A rotating anode includes a focal track that has a microstructure on a surface of the focal track. The microstructure is produced using deep reactive ion etching.
Claims20
A rotating anode comprising:
- a focal track that has a microstructure on a surface of the focal track,
- wherein the microstructure is produced by deep reactive ion etching.
An X-ray device comprising:
- at least one rotating anode comprising:
- a focal track that has a microstructure on a surface of the focal track, wherein the microstructure is produced by deep reactive ion etching.
A method for producing a rotating anode, the method comprising:
- deep reactive ion etching a microstructure in a surface of a focal track of the rotating anode.
Dependencies are inferred from the claim text.