X-Ray Fluorescence Spectrometer and X-Ray Fluorescence Analyzer

An X-ray fluorescence analysis method, comprising:

• a step of placing an X-ray source that emits primary X rays to irradiate a sample to be measured with said primary X rays;
• a step of placing a first spectroscopic unit that disperses fluorescence X rays emitted from said sample;
• a step of placing a second spectroscopic unit that disperses scattered X rays scattered from said sample;
• a step of placing a single X-ray detector that is positioned so as to be able to receive said fluorescence X rays dispersed by said first spectroscopic unit and said scattered X rays dispersed by said second spectroscopic unit, and that receives said fluorescence X rays and said scattered X rays;
• and
• a computation step of obtaining an intensity ratio between said fluorescence X rays and said scattered X rays detected by said single X-ray detector, and calculating a content of a trace element in said sample based on said obtained intensity ratio and a calibration curve.

An X-ray fluorescence spectrometer, comprising:

• an X-ray source that emits primary X rays;
• an analyzing crystal that is placed between said X-ray source and said sample, and that monochromatizes said primary X rays from said X-ray source to irradiate said sample with said monochromatized primary X rays;
• a first spectroscopic unit that disperses fluorescence X rays emitted from said sample irradiated with said primary X rays monochromatized by said analyzing crystal;
• a second spectroscopic unit that disperses scattered X rays scattered from said sample;
• and
• a single X-ray detector that is positioned so as to be able to receive said fluorescence X rays dispersed by said first spectroscopic unit and said scattered X rays dispersed by said second spectroscopic unit, and that receives said fluorescence X rays and said scattered X rays.