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US 2013/0170517 A1Published application
Bolometer having frequency detection
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsLaurent Duraffourg, Philippe Andreucci
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Abstract
A bolometer including: at least one electromechanical microsystem or nanosystem, the microsystem or nanosystem including a support and a mobile mass hung from beams above the support, the mobile mass forming an absorber of optical flux; actuation electrodes configured to set the mobile mass in vibration and arranged laterally relative to the mobile mass; and detection electrodes to detect variation in vibration frequency of the mobile mass arranged laterally relative to the mobile mass.
Claims33
1-26. (canceled)
A bolometer comprising:
- at least one electromechanical microsystem or nanosystem, the microsystem or nanosystem comprising a support and a mobile mass hung by suspending means above the support, the mobile mass forming an absorber of optical flux, the suspending means comprising at least two beams;
- actuation means configured to set the mobile mass in vibration at its resonance frequency in accordance with an own deformation mode of the mobile mass in a median plane thereof, the median plane being substantially fixed relative to the substrate;
- and
- detection means to detect variation in vibration frequency of the mobile mass, a thickness of the beams being at least ten times smaller than a thickness of the mobile mass.
1 more element
Dependencies are inferred from the claim text.