Device manufacturing apparatus and method for the same

A device manufacturing apparatus, comprising:

• a plurality of sealed-type unit process apparatuses configured to process a single process in a device manufacturing process;
• a sealed conveyance container configured to store one sheet of wafer as a work object;
• a wafer entry/exit front chamber being disposed for each unit process apparatus, configured to pass the wafer between the unit process apparatus and the sealed conveyance container;
• and
• conveyance means configured to convey the sealed conveyance container between the wafer entry/exit front chambers,
• wherein the wafer to be stored in the sealed conveyance container has a wafer size for manufacturing a device in a minimized unit, the plurality of unit process apparatuses is portable,
• the plurality of unit process apparatuses is arranged as a flow shop system for arrangement corresponding to an order of processes for the device,
• in a case where the number of a unit of manufacturing of the device is nearly equal to the number of the unit process apparatuses, the unit process apparatuses are arranged as a class shop system for classified arrangement at every major division of orders of processes, and
• in a case where the number of the unit of manufacturing is less than the number of the unit process apparatuses, the unit process apparatuses are arranged as a multicell shop system, the multicell shop system including approximately one unit process apparatus arranged in one cell for one process type, the multicell shop system including a plurality of the cells.