Gyroscope and method of fabricating a resonator for a gyroscope
AssigneeThe Regents of the University of Michigan
InventorsKhalil Najafi, Jae Yoong Cho
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Abstract
A gyroscope having a resonator, a plurality of electrodes located around the resonator, and a thin gap being located between the resonator and the plurality of electrodes. The resonator is axi-symmetric and may be at least partially torroidal in shape or composed of concentric rings. Piezoelectric electrodes or transduction may be used to drive or detect displacements of the resonator. The resonator may be fabricated using a fused silica flowing process.
Claims18
A gyroscope, comprising:
- a resonator;
- a plurality of electrodes being located around the resonator;
- and
- a thin gap being located between the resonator and the plurality of electrodes, wherein the resonator is axi-symmetric and is at least partially toroidal in shape.
A gyroscope, comprising:
- a resonator;
- a plurality of electrodes being located around the resonator;
- and
- a thin gap being located between the resonator and the plurality of electrodes, wherein the resonator is axi-symmetric and includes a plurality of concentric rings.
A gyroscope, comprising:
- a resonator;
- and
- a plurality of electrodes including at least one piezoelectric electrode;
- wherein the resonator is axi-symmetric and wherein the one or more piezoelectric electrodes transmit vibratory motion to the resonator, receive vibratory motion from the resonator, or both.
A method for fabricating a resonator for a gyroscope, comprising the step of fabricating a gyroscope resonator using a fused silica flowing process.
Dependencies are inferred from the claim text.