# US 2013/0158632 A1 · Methods of manufacturing target for generating charged particles, target structures, and treatment apparatuses including the target structures

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- Number: US 2013/0158632 A1
- Document ID: US20130158632A1
- Status: Published application
- Kind: A1
- Application number: 13/687,177
- Filed: 2012-11-28
- Published: 2013-06-20
- Earliest claimed: 2011-12-19
- Assignees: Electronics and Telecommunications Research Institute
- Inventors: Hyung Ju PARK; Hyeon-Bong PYO; Seong-Mok CHO; Moon Youn JUNG; Seunghwan KIM
- Web page: https://patentgrep.com/patent/US20130158632A1

## CPC

- A61N 5/022: {Apparatus adapted for a specific treatment}
- A61N 5/1077: {Beam delivery systems}
- A61N 2005/1088: {generated by laser radiation}
- A61N: ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY (measurement of bioelectric currents A61B; surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body A61B18/00; anaesthetic apparatus in general A61M; incandescent lamps H01K; infrared radiators for heating H05B)

## Abstract

Provided are a method of manufacturing a target for generating charged particles, a target structure, and a treatment apparatus including the target structure. The method includes forming a source layer on a substrate, forming balls on the source layer, forming a metal thin layer on the source layer exposed between the balls, and removing the balls to form holes in the metal thin layer so as to expose the source layer.

## Claims

### Claim 1

A method of manufacturing a target of a treatment apparatus, comprising:
forming a source layer on a substrate;
forming balls on the source layer;
forming a metal thin layer on the source layer exposed between the balls; and
removing the balls to form holes in the metal thin layer so as to expose the source layer.

### Claim 2 (depends on 1)

The method of claim 1, wherein the forming of the balls comprises a colloid lithograph process.

### Claim 3 (depends on 2)

The method of claim 2, wherein the balls comprise at least one of a block copolymer and an amphiphilic surfactant.

### Claim 4 (depends on 3)

The method of claim 3, wherein the balls are removed by a volatile solvent such as alcohol.

### Claim 5 (depends on 1)

The method of claim 1, wherein the source layer comprises at least one of silicon, a dielectric and a carbon thin layer.

### Claim 6 (depends on 5)

The method of claim 5, wherein the dielectric comprises a metal oxide layer, a silicon oxide layer, or a silicon nitride layer.

### Claim 7 (depends on 1)

The method of claim 1, wherein the forming of the metal thin layer comprises a sputtering process or an electroplating process.

### Claim 8 (depends on 1)

The method of claim 1, wherein the metal thin layer comprises at least one of gold, silver, and copper.

### Claim 9

A target comprising:
a substrate;
a source layer disposed on the substrate; and
a metal thin layer comprising holes partially exposing the source layer.

### Claim 10 (depends on 9)

The target of claim 9, wherein the metal thin layer comprises at least one of gold, silver, and copper.

### Claim 11 (depends on 9)

The target of claim 9, wherein the holes of the metal thin layer have a size ranging from about 1 nm to about 1 μm.

### Claim 12 (depends on 9)

The target of claim 9, wherein the substrate comprises a window that exposes the source layer or the metal thin layer to a lower side thereof.

### Claim 13 (depends on 12)

The target of claim 12, wherein the window is provided in plurality to be arrayed in a matrix or in concentric circles within the substrate.

### Claim 14 (depends on 9)

The target of claim 9, wherein the source layer comprises at least one of silicon, a dielectric, and a carbon thin layer.

### Claim 15 (depends on 14)

The target of claim 14, wherein the dielectric comprises a metal oxide layer, a silicon oxide layer, or a silicon nitride layer.

### Claim 16 (depends on 14)

The target of claim 14, wherein the carbon thin layer comprises at least one of graphene, graphite, fullerene, and a carbon nanotube.

### Claim 17

A treatment apparatus comprising:
a light source providing a laser beam;
a guiding structure disposed at an incidence side of the laser beam provided by the light source; and
a target comprising a substrate fixed to the guiding structure, a source layer disposed on the substrate, and a metal thin layer comprising holes partially exposing the source layer,
wherein the metal thin layer accelerates, through surface plasmon resonance, charged particles generated in the source layer by the laser beam passing through the holes.

### Claim 18 (depends on 17)

The treatment apparatus of claim 17, wherein the light source comprises a microwave laser.

### Claim 19 (depends on 17)

The treatment apparatus of claim 17, wherein the holes of the metal thin layer have a size ranging from about 1 nm to about 1 μm.

### Claim 20 (depends on 17)

The treatment apparatus of claim 17, wherein the metal thin layer comprises at least one of gold, silver, and copper.