# US 2013/0158466 A1 · Plasma brushes

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- Number: US 2013/0158466 A1
- Document ID: US20130158466A1
- Status: Published application
- Kind: A1
- Application number: 13/619,990
- Filed: 2012-09-14
- Published: 2013-06-20
- Earliest claimed: 2011-12-16
- Assignees: Electronics and Telecommunications Research Institute
- Inventors: Yark Yeon KIM; Han Young Yu; Yong Ju Yun; Won Ick Jang; Eun-ju Jeong; Changho Han
- Web page: https://patentgrep.com/patent/US20130158466A1

## CPC

- H05H 1/2406: {using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes}
- H05H 1/2465: {the plasma being activated by inductive coupling, e.g. using coiled electrodes}
- H05H: PLASMA TECHNIQUE (apparatus or processes specially adapted for producing X-rays H05G2/00); PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS

## Abstract

Plasma brushes are provided. The plasma brush includes a nozzle, a connector connected to a first end of the nozzle, a power electrode disposed at a portion of the nozzle, and a ground electrode disposed at a second end of the nozzle opposite to the connector.

## Claims

### Claim 1

A plasma brush comprising:
a nozzle;
a connector connected to a first end of the nozzle;
a power electrode disposed at a portion of the nozzle; and
a ground electrode disposed at a second end of the nozzle opposite to the connector.

### Claim 2 (depends on 1)

The plasma brush of claim 1, wherein the nozzle includes a discharge port having a rectangular shape or an oval shape, and the rectangular shape or the oval shape has a lateral width and a vertical height which is less than the lateral width.

### Claim 3 (depends on 2)

The plasma brush of claim 2, wherein the power electrode includes a first metal ring surrounding an outer surface of the nozzle and the ground electrode includes a second metal ring surrounding an outer surface of the nozzle.

### Claim 4 (depends on 3)

The plasma brush of claim 3, wherein the first metal ring and the second metal ring have the same vertical height.

### Claim 5 (depends on 3)

The plasma brush of claim 3, wherein a lateral width of the first metal ring is less than that of the second metal ring.

### Claim 6 (depends on 3)

The plasma brush of claim 3, wherein the nozzle includes a first groove in which the first metal ring is disposed and a second groove in which the second metal ring is disposed.

### Claim 7 (depends on 6)

The plasma brush of claim 6, wherein the nozzle further includes a protruding sill that is disposed between the first and second grooves to separate the first metal ring from the second metal ring.

### Claim 8 (depends on 2)

The plasma brush of claim 2, further comprising a filler nozzle inserted into the discharge port,
wherein the filler nozzle has a plurality of pores for ejecting a gas.

### Claim 9 (depends on 8)

The plasma brush of claim 8, wherein the ground electrode fills a space between the pores to have a grid shape or a mesh shape.

### Claim 10 (depends on 9)

The plasma brush of claim 9, wherein the ground electrode is disposed on a front surface of the filler nozzle, and wherein the plasma brush further comprises a first coating layer covering a front surface of the ground electrode opposite to filler nozzle.

### Claim 11 (depends on 2)

The plasma brush of claim 2, wherein the power electrode includes a plurality of needles disposed in the discharge port.

### Claim 12 (depends on 11)

The plasma brush of claim 11, further comprising a conductive adhesive agent that electrically connects the power needles to each other.

### Claim 13 (depends on 11)

The plasma brush of claim 11, further comprising a second coating layer that protects the power needles.

### Claim 14 (depends on 1)

The plasma brush of claim 1, wherein the nozzle includes a dielectric material.

### Claim 15 (depends on 14)

The plasma brush of claim 14, wherein the dielectric material includes an alumina material or a ceramic material.

### Claim 16 (depends on 1)

The plasma brush of claim 1, wherein the connector includes a tube having a plurality of channel holes through which a gas flows.

### Claim 17 (depends on 16)

The plasma brush of claim 16, wherein the tube includes an insulation rod surrounded by the plurality of channel holes.

### Claim 18 (depends on 16)

The plasma brush of claim 16, wherein the connector further includes a third coating layer protecting the tube.