# US 2013/0157549 A1 · Retaining ring and articles for carrier head

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- Number: US 2013/0157549 A1
- Document ID: US20130157549A1
- Status: Published application
- Kind: A1
- Application number: 13/768,314
- Filed: 2013-02-15
- Published: 2013-06-20
- Earliest claimed: 2000-09-08
- Assignees: Applied Materials, Inc., a Delaware corporation
- Inventors: Doyle E. Bennett; Andrew J. Nagengast; Hung Chih Chen
- Web page: https://patentgrep.com/patent/US20130157549A1

## CPC

- B24B 37/32: Retaining rings
- B24B 37/30: for single side lapping of plane surfaces
- B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS

## Abstract

A carrier head for chemical mechanical polishing that has a base, a mounting assembly connected to the base having a surface for contacting a substrate, and a retaining ring secured to the base. The retaining ring can include perfluoroalkoxy, polyetherketoneketone, polybenzimidazole, a semi-crystalline thermoplastic polyester, or a long molecular chain molecule produced from poly-paraphenylene terephthalamide.

## Claims

### Claim 1

A retaining ring for a chemical mechanical polishing head, comprising:
an upper portion configured to be secured to a base; and
a lower portion having a bottom surface to contact a polishing pad during polishing, wherein the lower portion includes a material selected from the group consisting of perfluoroalkoxy and polyetherketoneketone.

### Claim 2 (depends on 1)

The retaining ring of claim 1, wherein the lower portion consists of perfluoroalkoxy.

### Claim 3 (depends on 1)

The retaining ring of claim 1, wherein the lower portion consists of polyetherketoneketone.

### Claim 4 (depends on 1)

The retaining ring of claim 1, wherein the lower portion includes at least one of graphite or carbon fibers.

### Claim 5 (depends on 4)

The retaining ring of claim 4, wherein the lower portion includes perfluoroalkoxy.

### Claim 6 (depends on 4)

The retaining ring of claim 4, wherein the lower portion includes polyetherketoneketone.

### Claim 7 (depends on 1)

The retaining ring of claim 1, wherein the upper portion is more rigid than the lower portion.

### Claim 8 (depends on 7)

The retaining ring of claim 7, wherein the upper portion comprises stainless steel or aluminum.

### Claim 9 (depends on 1)

The retaining ring of claim 1, wherein the upper portion and the lower portion are the same material.

### Claim 10

A carrier head for chemical mechanical polishing, comprising:
a base;
a mounting assembly attached to the base having a surface for contacting a substrate; and
a retainer having an upper portion configured to be secured to a base and a lower portion having a bottom surface to contact a polishing pad during polishing, wherein the lower portion includes a material selected from the group consisting of perfluoroalkoxy and polyetherketoneketone.

### Claim 11 (depends on 10)

The carrier head of claim 10, wherein the lower portion consists of perfluoroalkoxy.

### Claim 12 (depends on 10)

The carrier head of claim 10, wherein the lower portion consists of polyetherketoneketone.

### Claim 13 (depends on 10)

The carrier head of claim 10, wherein the lower portion includes at least one of graphite or carbon fibers.

### Claim 14 (depends on 13)

The carrier head of claim 13, wherein the lower portion includes perfluoroalkoxy.

### Claim 15 (depends on 13)

The carrier head of claim 13, wherein the lower portion includes polyetherketoneketone.

### Claim 16 (depends on 10)

The carrier head of claim 10, wherein the upper portion is more rigid than the lower portion.

### Claim 17 (depends on 16)

The carrier head of claim 16, wherein the upper portion comprises stainless steel or aluminum.

### Claim 18 (depends on 10)

The carrier head of claim 10, wherein the upper portion and the lower portion are the same material.