# US 2013/0157421 A1 · Methods for the fabrication of integrated circuits including back-etching of raised conductive structures > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0157421 A1 - Document ID: US20130157421A1 - Status: Published application - Kind: A1 - Application number: 13/331,951 - Filed: 2011-12-20 - Published: 2013-06-20 - Earliest claimed: 2011-12-20 - Assignees: Globalfoundries Inc. - Inventors: Stefan Flachowsky; Ricardo P. Mikalo; Jan Hoentschel - Web page: https://patentgrep.com/patent/US20130157421A1 ## CPC - H10D 86/01: Manufacture or treatment - H10D 84/0128: {Manufacturing their channels} - H10D 84/0133: {Manufacturing common source or drain regions between multiple IGFETs} - H10D 84/038: {using silicon technology, e.g. SiGe} - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES ## Abstract Embodiments of a method for fabricating an integrated circuit are provided. In one embodiment, the method includes producing a partially-completed semiconductor device including a substrate, source/drain (S/D) regions, a channel region between the S/D regions, and a gate stack over the channel region. At least one raised electrically-conductive structure is formed over at least one of the S/D regions and separated from the gate stack by a lateral gap. The raised electrically-conductive structure is then back-etched to increase the width of the lateral gap and reduce the parasitic fringing capacitance between the raised electrically-conductive structure and the gate stack during operation of the completed semiconductor device. ## Claims ### Claim 1 A method for fabricating an integrated circuit, comprising: producing a partially-completed semiconductor device including a substrate, source/drain (S/D) regions, a channel region between the S/D regions, and a gate stack over the channel region; forming at least one raised electrically-conductive structure over at least one of the S/D regions and separated from the gate stack by a lateral gap; and back-etching the raised electrically-conductive structure to increase the width of the lateral gap and reduce the parasitic fringing capacitance between the raised electrically-conductive structure and the gate stack during operation of the completed semiconductor device. ### Claim 2 (depends on 1) A method according to claim 1 wherein producing comprises producing the partially-completed semiconductor device to further include sidewall spacers adjacent the gate stack, and wherein forming comprises forming at least one raised electrically-conductive structure adjacent at least one of the sidewall spacers. ### Claim 3 (depends on 2) A method according to claim 2 further comprising removing the sidewall spacers to produce the lateral gap separating the raised electrically-conductive structure and the gate stack. ### Claim 4 (depends on 1) A method according to claim 1 wherein back-etching comprises exposing the raised electrically-conductive structure to an isotropic etchant for a predetermined time period to remove a predetermined amount of material from the raised electrically-conductive structure. ### Claim 5 (depends on 1) A method according to claim 1 wherein back-etching comprises back-etching the raised electrically-conductive structure under controlled process conditions to impart the lateral gap with a final width between about 15 and about 30 nanometers. ### Claim 6 (depends on 5) A method according to claim 5 wherein back-etching comprises back-etching the raised electrically-conductive structure under controlled process conditions to impart the lateral gap with a final width of about 20 nanometers. ### Claim 7 (depends on 1) A method according to claim 1 further comprising forming an electrically-conductive plug in ohmic contact with the raised-conductive structure after back-etching the raised-conductive structure. ### Claim 8 (depends on 7) A method according to claim 7 wherein back-etching comprises back-etching the raised electrically-conductive structure under controlled process conditions to impart the upper surface of the raised electrically-conductive structure with a width greater than about 40 nanometers. ### Claim 9 (depends on 1) A method according to claim 1 wherein forming comprises epitaxially growing the raised electrically-conductive structure on the semiconductor substrate and over the S/D regions. ### Claim 10 (depends on 9) A method according to claim 9 wherein epitaxially growing comprises epitaxially growing the electrically-conductive structure on the semiconductor substrate from a strain material. ### Claim 11 (depends on 10) A method according to claim 10 wherein epitaxially growing comprises epitaxially growing the electrically-conductive structure on the semiconductor substrate from a strain material and to a predetermined height between about 25 and about 50 nanometers. ### Claim 12 (depends on 11) A method according to claim 11 wherein back-etching comprises back-etching the raised electrically-conductive structure under control process conditions to remove about 5 to 10 nanometers from the height of the raised electrically-conductive structure. ### Claim 13 (depends on 10) A method according to claim 10 wherein epitaxially growing comprises: etching at least one cavity within at least one of the S/D regions; and epitaxially growing a strain material within the cavity to form a body of strain material having a lower portion embedded within the semiconductor substrate and having an upper portion extending from the lower portion to define the raised electrically-conductive structure. ### Claim 14 (depends on 10) A method according to claim 10 wherein producing comprises producing a partially-completed P-type semiconductor device, and wherein epitaxially growing comprises epitaxially growing the electrically-conductive structure on the semiconductor substrate from a compressive strain material. ### Claim 15 (depends on 14) A method according to claim 14 wherein epitaxially growing comprises epitaxially growing the electrically-conductive structure on the semiconductor substrate from silicon-germanium. ### Claim 16 (depends on 10) A method according to claim 10 wherein producing comprises producing a partially-completed N-type semiconductor device, and wherein epitaxially growing comprises epitaxially growing the electrically-conductive structure on the semiconductor substrate from a tensile strain material. ### Claim 17 (depends on 1) A method according to claim 1 wherein producing comprises producing the partially-completed semiconductor device on an ultra-thin silicon-on-insulator (SOI) substrate, wherein forming comprises epitaxially growing raised S/D regions on the ultra-thin SOI substrate separated from the gate stack by lateral gap, and wherein back-etching comprises back-etching the raised S/D regions to increase the widths of the lateral gaps to reduce the parasitic fringing capacitance between the raised S/D regions and the gate stack during operation of the semiconductor device. ### Claim 18 A method for fabricating an integrated circuit, comprising: producing a partially-completed semiconductor device including a substrate, source/drain (S/D) regions, a channel region between the S/D regions, a gate stack over the channel region, and sidewall spacers adjacent opposing sides of the gate stack; etching cavities into the S/D regions; epitaxially growing bodies of strain material over the substrate, each body of strain material having an embedded region substantially filling the cavity and a freestanding overgrowth region adjacent the sidewall spacers; removing the sidewall spacers to create lateral gaps between the gate stack and the freestanding overgrowth regions; and back-etching each freestanding overgrowth regions to increase the widths of the lateral gaps such that any parasitic fringing capacitances created between the freestanding strain material overgrowth regions and the gate stack during operation of the completed semiconductor device are reduced. ### Claim 19 (depends on 18) A method according to claim 18 wherein epitaxially growing comprises epitaxially growing the bodies of strain material under controlled process conditions to impart each freestanding overgrowth regions with a predetermined height between about 25 and about 50 nanometers, and wherein back-etching comprises back-etching each freestanding overgrowth region to remove about 5 to about 10 nanometers from the height thereof. ### Claim 20 A method for fabricating an integrated circuit, comprising: producing a partially-completed semiconductor device including an ultra-thin silicon-on-insulator (SOI) substrate, source/drain (S/D) regions, a channel region between the S/D regions, a gate stack over the channel region, and sidewall spacers adjacent opposing sides of the gate stack; epitaxially growing raised source/drain regions over the S/D regions of the ultra-thin SOI substrate adjacent the sidewall spacers; removing the sidewall spacers to create a lateral gap between the gate stack and each raised S/D region; and back-etching each raised S/D regions to increase the width of the lateral gaps such that any parasitic fringing capacitances created between the raised S/D regions and the gate stack during operation of the completed semiconductor device are reduced.