# US 2013/0157016 A1 · Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0157016 A1 - Document ID: US20130157016A1 - Status: Published application - Kind: A1 - Application number: 13/645,386 - Filed: 2012-10-04 - Published: 2013-06-20 - Earliest claimed: 2011-12-16 - Assignees: Samsung Display Co., Ltd. - Inventors: Dong-Wook KIM - Web page: https://patentgrep.com/patent/US20130157016A1 ## CPC - C23C 14/042: {using masks} - C23C 14/12: Organic material - C23C 14/24: Vacuum evaporation - C23C 14/50: Substrate holders - H10P 72/0456: {in-line arrangement} - H10P 72/3204: {using magnetic elements} - H10P 72/3218: {Conveying cassettes, containers or carriers} - H10P 72/72: using electrostatic chucks - H10P 72/7618: {characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel} - Y10T 428/24612: Composite web or sheet - Y10T 428/24802: Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract An organic layer deposition apparatus including a deposition source for discharging a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; a patterning slit sheet arranged opposite to the deposition source nozzle unit and including a plurality of patterning slits; an electrostatic chuck, a substrate being attachable to and detachable from the electrostatic chuck; chuck moving members combined with the electrostatic chuck and configured to move the electrostatic chuck; and guide members to guide movement of the chuck moving members, the chuck moving members including first magnetic force generators, and the guide members including second magnetic force generators corresponding to the first magnetic force generators, the chuck moving members movable on the guide members by magnetic forces generated by the first magnetic force generators and the second magnetic force generators. ## Claims ### Claim 1 An organic layer deposition apparatus for forming an organic layer on a substrate, the apparatus comprising: a deposition source for discharging a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; a patterning slit sheet arranged opposite to the deposition source nozzle unit and including a plurality of patterning slits; an electrostatic chuck, the substrate being attachable to and detachable from the electrostatic chuck; chuck moving members combined with the electrostatic chuck and configured to move the electrostatic chuck; and guide members to guide movement of the chuck moving members, wherein the chuck moving members comprise first magnetic force generators, wherein the guide members comprise second magnetic force generators corresponding to the first magnetic force generators, wherein the chuck moving members are movable on the guide members by magnetic forces generated by the first magnetic force generators and the second magnetic force generators, wherein the substrate is spaced apart from the patterning slit sheet, and at least one of the substrate or the patterning slit sheet is movable relative to the other, and wherein the patterning slit sheet is smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction. ### Claim 2 (depends on 1) The organic layer deposition apparatus of claim 1, wherein each of the first magnetic force generators comprises a magnet rail including a plurality of magnets on a surface of one of the chuck moving members. ### Claim 3 (depends on 2) The organic layer deposition apparatus of claim 2, wherein, in the magnet rail, the magnets are arranged in a line and adjacent magnets of the plurality of magnets have different polarities. ### Claim 4 (depends on 2) The organic layer deposition apparatus of claim 2, wherein the plurality of magnets comprises electromagnets, permanent magnets, or superconductive magnets. ### Claim 5 (depends on 2) The organic layer deposition apparatus of claim 2, wherein each of the second magnetic force generators comprises: a plurality of magnet rollers spaced apart from the magnet rail; a shaft connecting the plurality of magnet rollers; and a shaft fixing unit fixing the shaft on the guide member to rotate the shaft about an axis extending along a lengthwise direction of the shaft. ### Claim 6 (depends on 5) The organic layer deposition apparatus of claim 5, wherein the plurality of magnet rollers comprises a plurality of magnets that are spirally twisted in the lengthwise direction of the shaft. ### Claim 7 (depends on 6) The organic layer deposition apparatus of claim 6, wherein, in the plurality of magnet rollers, adjacent magnets have different polarities. ### Claim 8 (depends on 5) The organic layer deposition apparatus of claim 5, wherein, when the magnet rollers are rotated, a first electric field generated by the magnet rollers is changed to move the chuck moving members each including the magnet rail on the guide members. ### Claim 9 (depends on 5) The organic layer deposition apparatus of claim 5, wherein each of the second magnetic force generators further comprises a driving unit for rotating the shaft. ### Claim 10 (depends on 1) The organic layer deposition apparatus of claim 1, wherein each of the first magnetic force generators comprises: a plurality of magnet rollers; a shaft connecting the plurality of magnet rollers; and a shaft fixing unit fixing the shaft onto the guide member to rotate the shaft about an axis extending along a lengthwise direction of the shaft. ### Claim 11 (depends on 10) The organic layer deposition apparatus of claim 10, wherein the plurality of magnet rollers comprises a plurality of magnets that are spirally twisted in the lengthwise direction of the shaft. ### Claim 12 (depends on 11) The organic layer deposition apparatus of claim 11, wherein, in the plurality of magnet rollers, adjacent magnets have different polarities. ### Claim 13 (depends on 10) The organic layer deposition apparatus of claim 10, wherein each of the second magnetic force generators comprises a magnet rail including a plurality of magnets on a surface of the chuck moving member, the magnet rollers being spaced apart from the magnet rail. ### Claim 14 (depends on 13) The organic layer deposition apparatus of claim 13, wherein, in the magnet rail, the magnets are arranged in a line, and adjacent magnets of the plurality of magnets have different polarities. ### Claim 15 (depends on 13) The organic layer deposition apparatus of claim 13, wherein the plurality of magnets comprises electromagnets, permanent magnets, or superconductive magnets. ### Claim 16 (depends on 13) The organic layer deposition apparatus of claim 13, wherein, when the magnet rollers are rotated, a first electric field generated by the magnet rollers changes a second electric field, and the second electric field is changed to move the chuck moving members each including the magnet rail on the guide members. ### Claim 17 (depends on 13) The organic layer deposition apparatus of claim 13, wherein each of the first magnetic force generators further comprises a driving unit for rotating the shaft. ### Claim 18 (depends on 17) The organic layer deposition apparatus of claim 17, wherein the driving unit is on each of the chuck moving members, and is moved together with the corresponding chuck moving member on the corresponding guide member. ### Claim 19 (depends on 1) The organic layer deposition apparatus of claim 1, further comprising a linear motion (LM) guide between each of the chuck moving members and corresponding ones of the guide members. ### Claim 20 (depends on 19) The organic layer deposition apparatus of claim 19, wherein each of the LM guides comprises: guide blocks on respective ones of the chuck moving members; and guide rails on respective ones of the guide members, wherein the guide blocks are movable on the guide rails. ### Claim 21 (depends on 1) The organic layer deposition apparatus of claim 1, further comprising: a loading unit for attaching the substrate to the electrostatic chuck; and an unloading unit for detaching the substrate on which deposition has been performed from the electrostatic chuck. ### Claim 22 (depends on 1) The organic layer deposition apparatus of claim 1, wherein the deposition source nozzle unit comprises a plurality of deposition source nozzles arranged in a direction, and the plurality of patterning slits of the patterning slit sheet are arranged in another direction perpendicular to the direction. ### Claim 23 (depends on 1) An organic light-emitting display apparatus manufactured using the organic layer deposition apparatus of claim 1, the organic light-emitting display apparatus comprising: the substrate; and at least one organic layer formed on the substrate by using the organic layer deposition apparatus, wherein the at least one organic layer has a linear pattern. ### Claim 24 (depends on 23) The organic light-emitting display apparatus of claim 23, wherein the at least one organic layer comprises an emission layer. ### Claim 25 (depends on 24) The organic light-emitting display apparatus of claim 24, wherein the at least one organic layer comprises at least one layer selected from the group consisting of a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer. ### Claim 26 (depends on 23) The organic light-emitting display apparatus of claim 23, wherein the at least one organic layer has a non-uniform thickness. ### Claim 27 (depends on 1) An organic light-emitting display apparatus comprising at least one organic layer that has a non-uniform thickness and that is formed by using the organic layer deposition apparatus of claim 1. ### Claim 28 A method of manufacturing an organic light-emitting display apparatus, the method comprising: fixing a substrate onto an electrostatic chuck; combining the electrostatic chuck with chuck moving members; moving the electrostatic chuck into a chamber by moving the chuck moving members on guide members; and forming an organic layer on the substrate by moving at least one of the substrate or an organic layer deposition assembly arranged in the chamber relative to the other, wherein the chuck moving members are moved on the guide members by magnetic forces, wherein the substrate is spaced apart from the organic layer deposition assembly, and wherein a patterning slit sheet of the organic layer deposition assembly is smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction. ### Claim 29 (depends on 28) The method of claim 28, wherein each of the chuck moving members comprises a first magnetic force generator on a surface thereof, and wherein each of the guide members comprises a second magnetic force generator on a surface thereof and corresponding to one of the first magnetic force generators. ### Claim 30 (depends on 29) The method of claim 29, wherein each of the first magnetic force generators comprises a magnet rail including a plurality of magnets. ### Claim 31 (depends on 30) The method of claim 30, wherein each of the second magnetic force generators comprises: a plurality of magnet rollers spaced apart from the magnet rail; a shaft connecting the plurality of magnet rollers; and a shaft fixing unit fixing the shaft on the respective guide member to rotate the shaft about an axis extending along a lengthwise direction of the shaft. ### Claim 32 (depends on 31) The method of claim 31, wherein moving the electrostatic chuck comprises: generating a driving force to rotate the shaft by using a driving unit, wherein, when the shaft is rotated, the magnet rollers are rotated to generate a first electric field, and the chuck moving members are moved on the guide members by a magnetic force between the first electric field and the magnet rail.