# US 2013/0156973 A1 · Method of producing magnesium fluoride coating, antireflection coating, and optical element

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- Number: US 2013/0156973 A1
- Document ID: US20130156973A1
- Status: Published application
- Kind: A1
- Application number: 13/770,890
- Filed: 2013-02-19
- Published: 2013-06-20
- Earliest claimed: 2009-07-30
- Assignees: Canon Kabushiki Kaisha
- Inventors: Hiroyuki Tanaka; Motokazu Kobayashi; Teigo Sakakibara
- Web page: https://patentgrep.com/patent/US20130156973A1

## CPC

- B05D 5/061: {Special surface effect}
- C03C 17/22: with other inorganic material (C03C17/34, C03C17/44 take precedence)
- C23C 18/08: characterised by the deposition of metallic material
- C23C 18/143: {Radiation by light, e.g. photolysis or pyrolysis}
- G02B 1/111: using layers comprising organic materials
- G02B 1/113: using inorganic layer materials only
- C03C 2217/285: Fluorides
- C03C 2217/732: made of a single layer
- C03C 2218/113: by sol-gel processes
- Y10T 428/26: Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- B05D: PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (conveying articles or workpieces through baths of liquid B65G, e.g. B65G49/02)
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A method of producing a magnesium fluoride coating includes a step of forming a coating by applying a solution containing a fluorine-containing organic magnesium compound represented by the following formula to a base and a step of heat-treating the coating while the coating is being irradiated with a beam of light with a wavelength of 246 nm or less: Mg(CF3—X—COO)2 (1) wherein X represents a single bond or one of —(CF2)n—, —(CH2)m—, and —CH2CF2— that may have a substituent, where n and m each represent an integer of 1 to 4. The temperature of the heat-treating step can be 250° C. or lower. The coating can be irradiated with a beam of light with a wavelength of 185 nm or less.

## Claims

### Claim 1

A method of producing a magnesium fluoride coating, comprising:
forming a coating by applying a solution containing a fluorine-containing organic magnesium compound represented by the following formula to a base;
heat-treating the coating;
irradiating the coating with a beam of light with a wavelength of 246 nm or less,
wherein the heat-treating and the irradiating are performed in combination, so that the fluorine-containing organic magnesium compound is decomposed:
Mg(CF3—X—COO)2 (1)
wherein X represents a single bond or one of —(CF2)n—, —(CH2)m—, and —CH2CF2— that may have a substituent, where n and m each represent an integer of 1 to 4.

### Claim 2 (depends on 1)

The method according to claim 1, wherein the temperature of the heat-treating step is 250° C. or lower and the coating is irradiated with a beam of light with a wavelength of 185 nm or less.

### Claim 3 (depends on 1)

The method according to claim 1, wherein the temperature of the heat-treating step is 200° C. or lower and the coating is irradiated with a beam of light with a wavelength of 185 nm or less.

### Claim 4 (depends on 1)

A method of producing an antireflection coating containing magnesium fluoride including the steps of the method according to claim 1.

### Claim 5 (depends on 4)

The method according to claim 4, wherein the antireflection coating has a refractive index of 1.35 or less at a wavelength of 587 nm.

### Claim 6 (depends on 4)

A method of producing an optical element comprising the antireflection coating produced by the method according to claim 4.