# US 2013/0156879 A1 · Pattern transfer apparatuses and methods for controlling the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0156879 A1 - Document ID: US20130156879A1 - Status: Published application - Kind: A1 - Application number: 13/691,969 - Filed: 2012-12-03 - Published: 2013-06-20 - Earliest claimed: 2011-12-14 - Assignees: Samsung Electronics Co., Ltd. - Inventors: Sung Hoon LEE; Young Tae CHO - Web page: https://patentgrep.com/patent/US20130156879A1 ## CPC - B29C 59/026: {of layered or coated substantially flat surfaces} - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A pattern transfer apparatus including a microscope having an ocular lens provided in a first housing, an objective lens provided in a second housing and a body tube connecting the ocular lens and the objective lens to each other, and a stamp coupled to an opening of the second housing and having a pattern to be transferred to a substrate may be provided. Checking of both defect position and transfer position of the substrate and transferring of the pattern can be performed concurrently through the microscope integrated with the stamp. Accordingly, the repetitive and continuous micro pattern transfer process can be more efficiently and rapidly performed, and the pattern can be more accurately and precisely transferred to the substrate. ## Claims ### Claim 1 A pattern transfer apparatus comprising: a microscope including, an ocular lens in a first housing, an objective lens in a second housing, and a body tube connecting the ocular lens and the objective lens to each other; and a stamp coupled to an opening of the second housing, the stamp having a pattern to be transferred to a substrate. ### Claim 2 (depends on 1) The pattern transfer apparatus according to claim 1, wherein the stamp is removably coupled to the opening of the second housing or is attached to the opening of the second housing. ### Claim 3 (depends on 1) The pattern transfer apparatus according to claim 1, wherein the stamp is made of a transparent elastomer. ### Claim 4 (depends on 1) The pattern transfer apparatus according to claim 1, further comprising: a moving assembly configured to move the microscope; and a control unit including, an image acquisition part configured to acquire an image of the substrate through the ocular lens and the objective lens, and a controller configured to check at least one of a transfer position and a defect position based on the image of the substrate and configured to control an operation of the moving assembly such that the pattern is transferred to at least one of the transfer position and the defect position. ### Claim 5 (depends on 1) The pattern transfer apparatus according to claim 1, wherein the objective lens and the second housing are provided in plural, respectively, and the microscope further includes a rotary plate, the rotary plate is configured to change positions of the plurality of objective lenses. ### Claim 6 (depends on 5) The pattern transfer apparatus according to claim 5, wherein the plurality of objective lenses have different magnifications from each other, and the stamp having a micro pattern is coupled to the objective lens, the objective lens having a magnification sufficient to observe the micro pattern. ### Claim 7 A control method for a pattern transfer apparatus including a first stage on which a substrate is located, a second stage onto which a functional material is spread, and a microscope moving between the first stage and the second stage, the control method comprising: moving the microscope integrated with a stamp to the second stage; controlling contact between the functional material and the stamp such that the functional material is spread onto a pattern of the stamp; moving the microscope integrated with the stamp to the first stage after completing the spreading of the functional material onto the pattern of the stamp; checking the substrate through the microscope integrated with the stamp; controlling contact between the microscope integrated with the stamp and the substrate such that the pattern of the stamp is transferred to the substrate; and moving the microscope integrated with the stamp away from the substrate after completing the transferring of the pattern to the substrate. ### Claim 8 (depends on 7) The control method according to claim 7, wherein the controlling contact between the microscope integrated with the stamp and the substrate includes controlling contact pressure of the microscope integrated with the stamp to apply a desired pressure to the substrate. ### Claim 9 (depends on 7) The control method according to claim 7, wherein the checking the substrate includes acquiring an image of the substrate through the microscope integrated with the stamp, and checking a defect position of the substrate based on the image. ### Claim 10 (depends on 9) The control method according to claim 9, wherein the transferring the pattern of the stamp to the substrate includes transferring a defect position marking pattern to an area around the defect position. ### Claim 11 (depends on 9) The control method according to claim 9, wherein the checking the substrate includes acquiring an image of the substrate through the microscope integrated with the stamp, checking a previously-formed pattern based on the image, and checking a transfer position of the substrate based on the previously-formed pattern. ### Claim 12 (depends on 11) The control method according to claim 11, further comprising: selecting an objective lens of a plurality of objective lenses based on the previously-formed pattern, each of the plurality of objective lens having a stamp with the pattern to be transferred to the substrate; and controlling rotation of a rotary plate to which the plurality of objective lenses are mounted such that the selected objective lens is positioned opposite the first stage. ### Claim 13 (depends on 7) The control method according to claim 7, further comprising: determining whether the transferring of the pattern is successful by comparing the pattern transferred to the substrate and a target pattern. ### Claim 14 (depends on 7) The control method according to claim 7, further comprising: selecting an objective lens of a plurality of objective lenses through an input part; and controlling rotation of a rotary plate to which the plurality of objective lenses are mounted such that the selected objective lens is positioned opposite the first stage. ### Claim 15 A pattern transfer apparatus comprising: a first stage configured to support a substrate; and a transfer unit including, an ocular lens and at least one objective lens coupled to the ocular lens through a connection structure, the at least one objective lens configured to face the first stage, the ocular lens configured to magnify an image magnified by the objective lens, and a stamp removably coupled to the objective lens, the stamp including a background part embossed or engraved with a pattern. ### Claim 16 (depends on 15) The pattern transfer apparatus of claim 15, wherein the stamp is made of a transparent elastomer such that the substrate is observable through the at least one objective lens. ### Claim 17 (depends on 15) The pattern transfer apparatus of claim 15, wherein the connection structure is a body tube, the body tube providing physical and/or mechanical connection between the ocular lens and the at least one objective lens and maintaining a distance therebetween. ### Claim 18 (depends on 15) The pattern transfer apparatus of claim 15, further comprising a rotary plate on which the at least one objective lens is rotatably mounted, wherein the at least one objective lens is a plurality of objective lenses having different magnification levels, ### Claim 19 (depends on 15) The pattern transfer apparatus of claim 15, wherein the background part of the stamp includes, a body, an accommodating part enclosed by the body, the accommodating part configured to store a functional material, and a discharge part covered by the pattern, the discharge part configured to discharge the functional material through the pattern. ### Claim 20 (depends on 15) The pattern transfer apparatus of claim 15, further including: a dispenser adjacent to the transfer unit, the dispenser configured to discharge a functional material through outlet ports thereof; and a second stage near the first stage, the second stage having a container configured to receive the functional material from the dispenser.