# US 2013/0156676 A1 · Method for Preparing a Trihalosilane

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- Number: US 2013/0156676 A1
- Document ID: US20130156676A1
- Status: Published application
- Kind: A1
- Application number: 13/809,263
- Filed: 2011-08-25
- Published: 2013-06-20
- Earliest claimed: 2010-09-08
- Assignees: Dow Corning Corporation
- Inventors: Dimitris Katsoulis; Robert Thomas Larsen; Matthew J. McLaughlin; Wendy Sparschu
- Web page: https://patentgrep.com/patent/US20130156676A1

## CPC

- C01B 33/1071: {Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof}
- B01J 23/8926: {Copper and noble metals}
- B01J 23/8946: {with alkali or alkaline earth metals}
- C01B 33/08: Compounds containing halogen
- C01B 33/10: Compounds containing silicon, fluorine, and other elements
- C01B 33/107: Halogenated silanes
- B01J 21/18: Carbon
- B01J 23/72: Copper
- C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C}
- B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS

## Abstract

A method of preparing a trihalosilane comprising the separate and consecutive steps of (i) contacting a copper catalyst with hydrogen gas and a silicon tetrahalide at a temperature of from 500 to 1400° C. to form a silicon-containing copper catalyst comprising at least 0.1% (w/w) of silicon, wherein the copper catalyst comprises a metal selected from copper and a mixture comprising copper and at least one element selected from gold, magnesium, and platinum; and (ii) contacting the silicon-containing copper catalyst with a hydrogen halide at a temperature of from 100 to 600° C. to form a trihalosilane.

## Claims

### Claim 1

A method of preparing a trihalosilane, the method comprising the following separate and consecutive steps:
(i) contacting a copper catalyst with hydrogen gas and a silicon tetrahalide at a temperature of from 500 to 1400° C. to form a silicon-containing copper catalyst comprising at least 0.1% (w/w) of silicon, wherein the copper catalyst comprises a metal selected from copper and a mixture comprising copper and at least one element selected from gold, magnesium, and platinum; and
(ii) contacting the silicon-containing copper catalyst with a hydrogen halide at from 100 to 600° C. to form a trihalosilane.

### Claim 2 (depends on 1)

The method according to claim 1, further comprising (iii) contacting the silicon-containing copper catalyst contacted with the hydrogen halide in step (ii) with the hydrogen gas and the silicon tetrahalide at a temperature of from 500 to 1400° C. to reform the silicon-containing copper catalyst comprising at least 0.1% (w/w) silicon; and (iv) contacting the reformed silicon-containing copper catalyst with the hydrogen halide at a temperature of from 100 to 600° C. to form a trihalosilane.

### Claim 3 (depends on 2)

The method according to claim 2, further comprising repeating steps (iii) and (iv) at least 1 time.

### Claim 4 (depends on 2)

The method according to claim 2, further comprising purging prior to the contacting of the reformed silicon-containing copper catalyst with the hydrogen halide in step (iv).

### Claim 5 (depends on 4)

The method according to claim 4, wherein the purging is conducted with argon or silicon tetrachloride.

### Claim 6 (depends on 1)

The method according to claim 1, further comprising purging prior to contacting the silicon-containing copper catalyst with the hydrogen halide in step (ii).

### Claim 7 (depends on 6)

The method according to claim 6, wherein the purging is conducted with argon or silicon tetrachloride.

### Claim 8 (depends on 1)

The method according to claim 1, wherein the copper catalyst further comprises a support.

### Claim 9 (depends on 8)

The method according to claim 8, wherein the copper catalyst comprises from 0.1 to 35% (w/w) of the mixture and the mixture comprises copper, gold and magnesium.

### Claim 10 (depends on 8)

The method according to claim 8, wherein the support is activated carbon.

### Claim 11 (depends on 1)

The method according to claim 1, wherein the silicon-containing copper catalyst comprises from 1 to 5% (w/w) of silicon.

### Claim 12 (depends on 1)

The method according to claim 1, wherein the mole ratio of hydrogen to silicon tetrahalide in step (i) is from 20:1 to 5:1.

### Claim 13 (depends on 1)

The method according to claim 1, wherein step (ii) is conducted in the presence of hydrogen.

### Claim 14 (depends on 1)

The method according to claim 1, wherein the trihalosilane has the formula HSiX3, where X is fluoro, chloro, bromo, or iodo.

### Claim 15 (depends on 1)

The method according to claim 1, wherein the hydrogen halide is HCl, the silicon tetrahalide is SiCl4, and the trihalosilane is HSiCl3.

### Claim 16 (depends on 1)

The method according to claim 1, further comprising recovering the trihalosilane.

### Claim 17 (depends on 1)

The method according to claim 1, wherein residence time of the hydrogen and silicon tetrahalide is from 1 to 10 s and residence time of the hydrogen halide is from 1 to 10 s.

### Claim 18 (depends on 1)

The method according to claim 1, wherein the contacting in step (ii) is conducted at a pressure from 7 to 1000 kPag.

### Claim 19 (depends on 1)

The method according to claim 1, wherein step (i) is conducted at a pressure from 7 to 1000 kPag.

### Claim 20 (depends on 1)

The method of claim 1, further comprising: using the trihalosilane to produce polysilicon and/or polysiloxanes.
