# US 2013/0156534 A1 · Transfer robot

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- Number: US 2013/0156534 A1
- Document ID: US20130156534A1
- Status: Published application
- Kind: A1
- Application number: 13/647,704
- Filed: 2012-10-09
- Published: 2013-06-20
- Earliest claimed: 2011-12-20
- Assignees: Kabushiki Kaisha Yaskawa Denki
- Inventors: Nobuyuki FURUKAWA; Kensuke OHNI
- Web page: https://patentgrep.com/patent/US20130156534A1

## CPC

- B25J 9/1065: {with parallelograms}
- B25J 19/0054: {Cooling means}
- B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50})

## Abstract

A transfer robot includes a first arm having a base end portion rotatably connected to an arm base, the first arm including a specified drive system arranged therein, a second arm having a base end portion rotatably connected to a tip end portion of the first arm, and a hand having a hand base rotatably connected to a tip end portion of the second arm, the hand serving to hold a substrate. The first arm includes an arm housing provided with a plurality of air injection holes and at least one air exhaust hole are provided. The first arm is configured such that a compressed air injected through the air injection holes flows along an inner wail surface of the arm housing and flows out through the air exhaust hole.

## Claims

### Claim 1

A transfer robot, comprising:
a first arm having a base end portion rotatably connected to an arm base, the first arm including a specified drive system arranged therein;
a second arm having a base end portion rotatably connected to a tip end portion of the first arm; and
a hand having a hand base rotatably connected to a tip end portion of the second arm, the hand serving to hold a substrate,
wherein the first arm includes an arm housing provided with a plurality of air injection holes and at least one air exhaust hole are provided, the first arm being configured such that a compressed air injected through the air injection holes flows along an inner wall surface of the arm housing and flows out through the air exhaust hole.

### Claim 2 (depends on 1)

The robot of claim 1, wherein the second arm has no drive system and serves as a portion of a link being driven by the first arm, the inner wall surface of the arm housing of the first arm being cooled by the compressed air injected through the air injection holes.

### Claim 3 (depends on 1)

The robot of claim 1, wherein the number of the air exhaust hole is one, and the specified drive system of the first arm includes a speed reducer provided with a hollow shaft and arranged at one end portion of the arm housing, the hollow shaft serving as the air exhaust hole.

### Claim 4 (depends on 3)

The robot of claim 3, wherein the specified drive system of the first arm includes an additional speed reducer provided with a hollow shaft and arranged at the other end portion of the arm housing, one of the air injection holes being arranged adjacent to a base end opening of the hollow shaft of the additional speed reducer.

### Claim 5 (depends on 1)

The robot of claim 1, wherein the air injection holes includes an air injection hole for injecting the compressed air along a side surface of the arm housing.

### Claim 6 (depends on 1)

The robot of claim 1, wherein the first arm includes a fin joined to the arm housing, the fin arranged within the arm housing such that the fin is exposed to the compressed air.

### Claim 7 (depends on 6)

The robot of claim 6, wherein the fin is arranged to obliquely extend across a flow path of the compressed air.