# US 2013/0156253 A1 · Electrodynamic speaker structure having mems technology

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- Number: US 2013/0156253 A1
- Document ID: US20130156253A1
- Status: Published application
- Kind: A1
- Application number: 13/522,930
- Filed: 2011-01-14
- Published: 2013-06-20
- Earliest claimed: 2010-01-19
- Assignees: Universite Paris-Sud 11; Universite Du Maine
- Inventors: Guy Lemarquand; Valerie Lemarquand; Elie Marie Lefeuvre; Marion Alexandra Laurence Woytasik; Johan Moulin; Fabien Jean François Parrain
- Web page: https://patentgrep.com/patent/US20130156253A1

## CPC

- B81B 3/007: {For controlling stiffness, e.g. ribs}
- H04R 7/18: at the periphery
- H04R 23/00: Transducers other than those covered by groups H04R9/00 - H04R21/00 {(diaphragms for transducers of the distributed-mode type H04R7/045)}
- B81B 2201/0257: Microphones or microspeakers
- H04R 7/04: Plane diaphragms
- H04R 9/047: {in which the windings of the moving coil lay in the same plane}
- H04R 9/06: Loudspeakers
- H04R 9/10: Telephone receivers
- H04R 31/006: {Interconnection of transducer parts (of diaphragm and outer suspension by moulding H04R31/003)}
- H04R 2201/003: Mems transducers or their use
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
- H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K)

## Abstract

Said electrodynamic speaker structure having MEMS technology, comprising a stator-forming means (2), diaphragm-forming means (3), and resiliently shape-changing means (4) for connecting all of said means, is characterized in that the stator-forming means (2), diaphragm-forming means (3), and connecting means (4) are made of a single part by machining a silicon chip.

## Claims

### Claim 1

An electrodynamic speaker structure having MEMS technology, comprising a stator-forming means, diaphragm-forming means, and resiliently shape-changing means for connecting all of said means, wherein the stator-forming means, diaphragm-forming means, and connecting means are made of a single part by machining a silicon chip.

### Claim 2 (depends on 1)

The electrodynamic speaker structure according to claim 1, wherein the connecting means include connecting arms regularly distributed between the stator-forming means and the diaphragm-forming means.

### Claim 3 (depends on 1)

The electrodynamic speaker structure according to claim 1, wherein at least one of the surfaces of the diaphragm-forming means comprises stiffening means thereof.

### Claim 4 (depends on 3)

The electrodynamic speaker structure according to claim 3, wherein the stiffening means includes ribs.

### Claim 5 (depends on 4)

The electrodynamic speaker structure according to claim 4, wherein the stiffening means includes radial ribs.

### Claim 6 (depends on 1)

The electrodynamic speaker structure according to claim 1, Wherein the diaphragm-forming means has a thickness increasing toward the periphery thereof.

### Claim 7 (depends on 1)

The electrodynamic speaker structure according to claim 1, wherein at least one of the surfaces of the diaphragm-forming means includes a coil-forming means.

### Claim 8 (depends on 7)

The electrodynamic speaker structure according to claim 7, wherein the coil-forming means comprises electrical connecting portions supported by the connecting means.

### Claim 9 (depends on 7)

The electrodynamic speaker structure according to claim 7, wherein the coil-forming means is made from copper.

### Claim 10 (depends on 1)

The electrodynamic speaker structure according to claim 1, wherein at least one of the surfaces of the stator-forming means includes a means made from a hard magnetic material.

### Claim 11 (depends on 10)

The electrodynamic speaker structure according to claim 10, wherein the means made from the hard magnetic material assumes the form of a ring arranged around the diaphragm-forming means.

### Claim 12 (depends on 10)

The electrodynamic speaker structure according to claim 10, wherein the means made from a hard magnetic material is made from a Samarium-Cobalt or Iron-Neodyme-Boron alloy.

### Claim 13 (depends on 1)

The electrodynamic speaker structure according to claim 1, wherein at least one of the surfaces of the diaphragm-forming means includes blind piercings.

### Claim 14 (depends on 7)

The electrodynamic speaker structure according to claim 7, wherein the mass of the coil-forming means is equal or approximately equal to the mass of the diaphragm-forming means.

### Claim 15 (depends on 1)

The electrodynamic speaker structure according to claim 1, wherein the silicon chip in which the different means of the structure are machined is based on SOI technology.

### Claim 16 (depends on 1)

The electrodynamic speaker structure according to claim 1, wherein the chip is made from monocrystalline silicon.