# US 2013/0156162 A1 · X-ray waveguide and x-ray waveguide system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0156162 A1 - Document ID: US20130156162A1 - Status: Published application - Kind: A1 - Application number: 13/690,559 - Filed: 2012-11-30 - Published: 2013-06-20 - Earliest claimed: 2011-12-02 - Assignees: Canon Kabushiki Kaisha - Inventors: Kohei Okamoto; Atsushi Komoto; Wataru Kubo; Hirokatsu Miyata; Takashi Noma - Web page: https://patentgrep.com/patent/US20130156162A1 ## CPC - G21K 1/00: Arrangements for handling particles or ionising radiation, e.g. focusing or moderating - B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic - G21K 1/062: {Devices having a multilayer structure} - G21K: HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract An X-ray waveguide includes a cladding and a core to guide X-rays. The core includes a periodic structure of plural substances having different values of a refractive-index real part in a direction perpendicular to an X-ray guiding direction. A Bragg angle determined depending on a wavelength of an X-ray and periodicity of the periodic structure is smaller than a critical angle for total reflection of the X-ray at an interface between the core and the cladding. The Bragg angle is larger than a critical angle for total reflection of the X-ray at an interface between the plural substances constituting the periodic structure. The core has, in the X-ray guiding direction, two or more regions differing in periodic number of the periodic structure constituting the core with a core width in a direction of period being different between the two or more regions corresponding to change of the periodic number. ## Claims ### Claim 1 An X-ray waveguide including a cladding and a core to guide an X-ray, wherein the core includes a periodic structure, which is made of plural substances each having a different value of a real part of refractive index, in a direction perpendicular to an X-ray guiding direction, a Bragg angle determined depending on a wavelength of the X-ray and periodicity of the periodic structure is smaller than a critical angle for total reflection of the X-ray at an interface between the core and the cladding, the Bragg angle is larger than a critical angle for total reflection of the X-ray at an interface between the plural substances constituting the periodic structure, and the core has two or more regions differing in periodic number of the periodic structure constituting the core with a core width in a direction of period being different between the two or more regions corresponding to change of the periodic number. ### Claim 2 (depends on 1) The X-ray waveguide according to claim 1, wherein the two or more regions differing in periodic number of the core are periodically arranged in the X-ray guiding direction. ### Claim 3 (depends on 2) The X-ray waveguide according to claim 2, wherein a period, in the X-ray guiding direction, of the two or more regions differing in periodic number of the core and being periodically arranged in the X-ray guiding direction is matched with a repetition period at which a fundamental wave is totally reflected at the interface between the core and the cladding in the X-ray guiding direction, the fundamental wave forming a waveguide mode that is formed in the waveguide and that is resonant with the periodic structure of the core. ### Claim 4 (depends on 2) The X-ray waveguide according to claim 2, wherein a period, in the X-ray guiding direction, of the two or more regions differing in periodic number of the core and being periodically arranged in the X-ray guiding direction is a value obtained by multiplying or dividing, by a natural number, a repetition period at which a fundamental wave is totally reflected at the interface between the core and the cladding in the X-ray guiding direction, the fundamental wave forming a waveguide mode that is formed in the waveguide and that is resonant with the periodic structure of the core, the value being in a range of 1/100 to 10 times the repetition period. ### Claim 5 (depends on 1) The X-ray waveguide according to claim 1, wherein the periodic structure is a periodic multilayer film in which films made of plural substances having different refractive indices are laminated. ### Claim 6 (depends on 5) The X-ray waveguide according to claim 5, wherein a thickness of each of the films constituting the periodic multilayer film is constant in the X-ray guiding direction. ### Claim 7 (depends on 5) The X-ray waveguide according to claim 5, wherein the periodic multilayer film is a mesostructured material having a lamellar structure. ### Claim 8 (depends on 1) The X-ray waveguide according to claim 1, wherein the periodic structure is constituted as a mesostructured material made of a mesoporous material. ### Claim 9 An X-ray waveguide system including at least an X-ray source and an X-ray waveguide configured to guide an X-ray emitted from the X-ray source, the X-ray waveguide including a cladding and a core to guide the X-ray, wherein the core includes a periodic structure, which is made of plural substances each having a different value of a real part of refractive index, in a direction perpendicular to an X-ray guiding direction, a Bragg angle determined depending on a wavelength of the X-ray and periodicity of the periodic structure is smaller than a critical angle for total reflection of the X-ray at an interface between the core and the cladding, the Bragg angle is larger than a critical angle for total reflection of the X-ray at an interface between the plural substances constituting the periodic structure, and the core has two or more regions differing in periodic number of the periodic structure constituting the core with a core width in a direction of period being different between the two or more regions corresponding to change of the periodic number. ### Claim 10 (depends on 9) The X-ray waveguide system according to claim 9, wherein the two or more regions differing in periodic number of the core are periodically arranged in the X-ray guiding direction. ### Claim 11 (depends on 10) The X-ray waveguide system according to claim 10, wherein a period, in the X-ray guiding direction, of the two or more regions differing in periodic number of the core and being periodically arranged in the X-ray guiding direction is matched with a repetition period at which a fundamental wave is totally reflected at the interface between the core and the cladding in the X-ray guiding direction, the fundamental wave forming a waveguide mode that is formed in the waveguide and that is resonant with the periodic structure of the core. ### Claim 12 (depends on 10) The X-ray waveguide system according to claim 10, wherein a period, in the X-ray guiding direction, of the two or more regions differing in periodic number of the core and being periodically arranged in the X-ray guiding direction is a value obtained by multiplying or dividing, by a natural number, a repetition period at which a fundamental wave is totally reflected at the interface between the core and the cladding in the X-ray guiding direction, the fundamental wave forming a waveguide mode that is formed in the waveguide and that is resonant with the periodic structure of the core, the value being in a range of 1/100 to 10 times the repetition period. ### Claim 13 (depends on 9) The X-ray waveguide system according to claim 9, wherein the periodic structure is a periodic multilayer film in which films made of plural substances having different refractive indices are laminated. ### Claim 14 (depends on 13) The X-ray waveguide system according to claim 13, wherein a thickness of each of the films constituting the periodic multilayer film is constant in the X-ray guiding direction. ### Claim 15 (depends on 13) The X-ray waveguide system according to claim 13, wherein the periodic multilayer film is a mesostructured material having a lamellar structure. ### Claim 16 (depends on 9) The X-ray waveguide system according to claim 9, wherein the periodic structure is constituted as a mesostructured material made of a mesoporous material.