# US 2013/0155484 A1 · Plasmonic modulator incorporating a solid-state phase change material > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0155484 A1 - Document ID: US20130155484A1 - Status: Published application - Kind: A1 - Application number: 13/327,298 - Filed: 2011-12-15 - Published: 2013-06-20 - Earliest claimed: 2011-12-15 - Assignees: Northrop Grumman Systems Corporation - Inventors: LUKE SWEATLOCK; Kenneth Diest; James Ma; Vladan Jankovic; Imogen Pryce; Ryan Briggs; Harry Atwater - Web page: https://patentgrep.com/patent/US20130155484A1 ## CPC - G02F 1/23: for the control of the colour (G02F1/03 - G02F1/21 take precedence) - B82Y 20/00: Nanooptics, e.g. quantum optics or photonic crystals - G02F 1/0147: {based on thermo-optic effects (G02F1/132 takes precedence)} - G02F 1/065: in an optical waveguide structure - G02F 2203/10: plasmon - G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract Systems and methods are provided for modulating light of a wavelength of interest. The modulator assembly includes a plasmonic layer that supports surface plasmon polaritons at the wavelength of interest and a layer of solid-state phase change material having a first phase in which it is substantially transparent to light of the wavelength of interest and a second phase in which it is substantially opaque to light of the wavelength of interest. A control mechanism is configured to alter the phase of the solid-state phase change material between the first phase and the second phase. Each of the plasmonic layer and the layer of solid-state phase change material are configured as to provide a plasmonic mode of transmission for light of the wavelength of interest. ## Claims ### Claim 1 A nanoscale plasmonic modulator assembly for modulating light of a wavelength of interest comprising: a plasmonic layer that supports surface plasmon polaritons at the wavelength of interest; a layer of solid-state phase change material having a first phase in which it is substantially transparent to light of the wavelength of interest and a second phase in which it is substantially opaque to light of the wavelength of interest; and a control mechanism configured to alter the phase of the solid-state phase change material between the first phase and the second phase; wherein each of the plasmonic layer and the layer of solid-state phase change material are configured as to provide a plasmonic mode of transmission for light of the wavelength of interest. ### Claim 2 (depends on 1) The nanoscale plasmonic modulator assembly of claim 1, further comprising a dielectric layer that is substantially transparent to light of the wavelength of interest. ### Claim 3 (depends on 2) The nanoscale plasmonic modulator assembly of claim 2, wherein the dielectric layer is a first dielectric layer and the assembly further comprises a second dielectric layer, the layer of solid-state phase change material being positioned between the first dielectric layer and the second dielectric layer. ### Claim 4 (depends on 3) The nanoscale plasmonic modulator assembly of claim 3, wherein the plasmonic layer is a first plasmonic layer and the assembly further comprises a second plasmonic layer, the first dielectric layer being positioned between the first plasmonic layer and the layer of solid-state phase change material, and the second dielectric layer being positioned between the layer of solid-state phase change material and the second plasmonic layer. ### Claim 5 (depends on 2) The nanoscale plasmonic modulator assembly of claim 2, wherein the layer of solid-state phase change material is positioned between the plasmonic layer and the dielectric layer. ### Claim 6 (depends on 5) The nanoscale plasmonic modulator assembly of claim 5, wherein the plasmonic layer is a first plasmonic layer, and the assembly further comprises a second plasmonic layer, each of the layer of solid-state phase change material and the dielectric layer being positioned between the first plasmonic layer and the second plasmonic layer. ### Claim 7 (depends on 1) The nanoscale plasmonic modulator assembly of claim 1, wherein the layer of solid-state phase change material is a first layer of solid-state phase change material, and the assembly further comprises a second layer of solid-state phase change material, the plasmonic layer being positioned between the first layer of solid-state phase change material and the second layer of solid-state phase change material. ### Claim 8 (depends on 1) The nanoscale plasmonic modulator assembly of claim 1, wherein the layer of solid-state phase change material comprises a layer of vanadium oxide. ### Claim 9 (depends on 1) The nanoscale plasmonic modulator assembly of claim 1, wherein the layer of solid-state phase change material comprises a chalcogenide phase change film. ### Claim 10 (depends on 8) The nanoscale plasmonic modulator assembly of claim 8, wherein the control mechanism comprises circuitry configured to apply an electrical field to the vanadium oxide. ### Claim 11 (depends on 1) The nanoscale plasmonic modulator assembly of claim 1, wherein the control mechanism comprises an ultrafast optical pumping arrangement. ### Claim 12 (depends on 1) The nanoscale plasmonic modulator assembly of claim 1, wherein the control mechanism comprises thermal switching, via elements which heat or cool the layer of solid-state phase change material. ### Claim 13 A method for fabricating a nanoscale plasmonic modulator comprising: depositing a solid-state phase change material on a first substrate; depositing a first plasmonic layer on the solid-state phase change material, such that the solid-state phase change material is substantially covered by the first plasmonic layer; depositing a second plasmonic layer on a second substrate; bonding the first substrate to the second substrate, such that the first plasmonic layer is joined to the second plasmonic layer; and etching substantially all of the first substrate to expose the solid-state phase change material. ### Claim 14 (depends on 13) The method of claim 13, wherein depositing a solid-state phase change material on a first substrate comprises depositing the solid-state phase change material via pulsed laser deposition. ### Claim 15 (depends on 13) The method of claim 13, further comprising depositing a third plasmonic layer on the solid-state phase change material, such that the solid-state phase change material is substantially covered by the third plasmonic layer. ### Claim 16 (depends on 13) The method of claim 13, depositing a second layer of solid-state phase change material on the second substrate prior to depositing the second plasmonic layer, such that the second plasmonic layer substantially covers the second layer of solid-state phase change material. ### Claim 17 (depends on 13) The method of claim 13, further comprising: depositing an dielectric layer on the solid-state phase change material, such that the solid-state phase change material is substantially covered by the dielectric layer; and depositing a third plasmonic layer on the dielectric layer. ### Claim 18 (depends on 13) The method of claim 13, further comprising weakening the first substrate via ion implantation prior to bonding the first substrate to the second substrate. ### Claim 19 A nanoscale plasmonic modulator assembly for modulating light of a wavelength of interest comprising: a plasmonic layer that is substantially opaque to light of the wavelength of interest; a dielectric layer that is substantially transparent to light of the wavelength of interest a layer of vanadium oxide; and a control mechanism configured to alter the phase of the vanadium oxide between a metallic phase and an insulator phase; wherein each of the plasmonic layer, the dielectric layer, and the layer of vanadium oxide are configured as to provide a plasmonic mode of transmission for light of the wavelength of interest. ### Claim 20 (depends on 19) The nanoscale plasmonic modulator assembly of claim 19, wherein the dielectric layer is formed from sapphire and the plasmonic layer is formed from silver. ### Claim 21 (depends on 19) The nanoscale plasmonic modulator assembly of claim 19, wherein the dielectric layer is formed from sapphire and the plasmonic layer is formed from gold. ### Claim 22 (depends on 19) The nanoscale plasmonic modulator assembly of claim 19, wherein the dielectric layer is formed from silicon dioxide and the plasmonic layer is formed from silver. ### Claim 23 (depends on 19) The nanoscale plasmonic modulator assembly of claim 19, wherein the dielectric layer is formed from silicon dioxide and the plasmonic layer is formed from gold.