# US 2013/0154773 A1 · Waveguide

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- Number: US 2013/0154773 A1
- Document ID: US20130154773A1
- Status: Published application
- Kind: A1
- Application number: 13/327,318
- Filed: 2011-12-15
- Published: 2013-06-20
- Earliest claimed: 2011-12-15
- Assignees: Infineon Technologies AG
- Inventors: Domagoj Siprak
- Web page: https://patentgrep.com/patent/US20130154773A1

## CPC

- H01P 3/006: {Conductor backed coplanar waveguides}
- H01P 3/003: {Coplanar lines}
- H01P 3/082: {Multilayer dielectric}
- H05K 1/0219: {Printed shielding conductors for shielding around or between signal conductors, e.g. coplanar or coaxial printed shielding conductors}
- H05K 1/0245: {Lay-out of balanced signal pairs, e.g. differential lines or twisted lines}
- H05K 2201/09236: Parallel layout
- H05K 2201/09254: Branched layout
- H05K 2201/09354: Ground conductor along edge of main surface
- H01P: WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE (operating at optical frequencies G02B)
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS

## Abstract

A waveguide comprises an inner conductor arranged in a first layer, a pair of outer conductors comprising a first outer conductor and a second outer conductor, and a pair of slotted shields comprising a first slotted shield and a second slotted shield. The first slotted shield and the second slotted shield are arranged in a second layer with a spacing in between to form a section of a ground shield, wherein the second layer is parallel to the first layer. The first slotted shield is connected to the first outer conductor and the second slotted shield is connected to the second outer conductor.

## Claims

### Claim 1

A waveguide comprising:
an inner conductor arranged in a first layer;
a pair of outer conductors comprising a first outer conductor and a second outer conductor; and
a pair of slotted shields comprising a first slotted shield and a second slotted shield,
wherein the first slotted shield and the second slotted shield are arranged in a second layer with a spacing in between to form a section of a ground shield,
wherein the second layer is parallel to the first layer, and
wherein the first slotted shield is connected to the first outer conductor, and wherein the second slotted shield is connected to the second outer conductor.

### Claim 2 (depends on 1)

The waveguide according to claim 1, wherein the first slotted shield and the second slotted shield comprise a plurality of slots which are arranged in the second layer, and which are perpendicular to a main extension of the inner conductor within a tolerance of +/−10 degree.

### Claim 3 (depends on 1)

The waveguide according to claim 1, wherein the first outer conductor and the second outer conductor and/or the first slotted shield and the second slotted shield are parallel to the inner conductor at least in an area along a main extension of the inner conductor.

### Claim 4 (depends on 1)

The waveguide according to claim 1, wherein the inner conductor is straight.

### Claim 5 (depends on 1)

The waveguide according to claim 1, wherein the inner conductor is curved or comprises a bend.

### Claim 6 (depends on 5)

The waveguide according to claim 5, wherein the first outer conductor and the second outer conductor are electrically connected in an area where the inner conductor is curved or comprises the bend.

### Claim 7 (depends on 1)

The waveguide according to claim 1, wherein the spacing extends along the inner conductor.

### Claim 8 (depends on 1)

The waveguide according to claim 1, wherein the spacing is in a range between 0.1 and 5.0 times a width of the inner conductor.

### Claim 9 (depends on 8)

The waveguide according to claim 8, wherein the spacing is smaller than the spacing of the first outer conductor and second outer conductor.

### Claim 10 (depends on 1)

The waveguide according to claim 1, wherein the spacing is in a range between 10 nm up to a value smaller than the spacing of the first outer conductor and second outer conductor.

### Claim 11 (depends on 8)

The waveguide according to claim 8, wherein the spacing is equal to the width of the inner conductor.

### Claim 12 (depends on 1)

The waveguide according to claim 1, wherein the inner conductor and the pair of outer conductors are arranged in the first layer such that the inner conductor is between the first outer conductor and the second outer conductor.

### Claim 13 (depends on 1)

The waveguide according to claim 1, wherein the waveguide comprises at least one further inner conductor which is arranged in the first layer and which is parallel to the inner conductor.

### Claim 14 (depends on 1)

The waveguide according to claim 1, wherein the waveguide comprises a further inner conductor arranged parallel to the inner conductor, wherein the further inner conductor is arranged in a further layer which is parallel to the first layer.

### Claim 15 (depends on 1)

The waveguide according to claim 1, wherein the waveguide comprises a further pair of outer conductors comprising a third outer conductor and a fourth outer conductor, wherein the further pair of outer conductors is arranged parallel to the pair of outer conductors comprising the first outer conductor and the second outer conductor, and wherein the further pair of outer conductors is arranged in a further layer which is parallel to the first layer.

### Claim 16 (depends on 1)

The waveguide according to claim 1, wherein the first outer conductor is electrically connected to the first slotted shield by one or more vias and wherein the second outer conductor is electrically connected to the second slotted shield by one or more vias.

### Claim 17 (depends on 1)

The waveguide according to claim 1, which comprises an additional pair of slotted shields comprising a third slotted shield and a fourth slotted shield, wherein the additional pair of slotted shields is arranged parallel to the pair of slotted shields comprising the first slotted shield and the second slotted shield, and
wherein the additional pair of slotted shields is arranged in an additional layer which is parallel to the first layer and the second layer.

### Claim 18 (depends on 17)

The waveguide according to claim 17, wherein the additional layer is arranged between the first layer and the second layer.

### Claim 19 (depends on 17)

The waveguide according to claim 17, wherein the first layer is arranged between the second layer and the additional layer.

### Claim 20 (depends on 17)

The waveguide according to claim 17, wherein the waveguide comprises a further pair of outer conductors comprising a third outer conductor and a fourth outer conductor,
wherein the further pair of outer conductors is arranged parallel the pair of outer conductors comprising the first outer conductor and the second outer conductor, and
wherein the further pair of outer conductors is arranged in a further layer, which is arranged parallel to the first layer and the second layer and arranged between the first layer and the additional layer.

### Claim 21 (depends on 1)

The waveguide according to claim 1, wherein the pair of slotted shields comprises an electrically conductive fill structure with a spacing between the first slotted shield and the fill structure and with a spacing between the second slotted shield and the fill structure
wherein the electrically conductive fill structure is arranged in the second layer and between the first slotted shield and the second slotted shield.

### Claim 22

A waveguide comprising:
an inner conductor arranged in a first layer and extending along a main extension;
a pair of outer conductors comprising a first outer conductor and a second outer conductor; and
a pair of slotted shields comprising a first slotted shield and a second slotted shield,
wherein a boundary of the first outer conductor is parallel to a boundary of the inner conductor adjacent to the first outer conductor, and wherein a boundary of the second outer conductor is parallel to a boundary of the inner conductor adjacent to the second outer conductor,
wherein the first slotted shield and the second slotted shield are arranged in a second layer with a spacing in between to form a section of a ground shield, wherein the second layer is parallel to the first layer,
and wherein the spacing is in a range between 10 nm up to a value smaller than the spacing of the first and second outer conductors or in a range between 0.1 and 5.0 times the width of the inner conductor but smaller than the spacing of the first and second outer conductors,
wherein the first slotted shield is electrically connected to the first outer conductor, and wherein the second slotted shield is electrically connected to the second outer conductor,
wherein the first slotted shield and the second slotted shield comprise a plurality of slots arranged in the second layer, which are perpendicular to the main extension within a tolerance of +/−10 degrees.

### Claim 23

A quarter wave length transformer comprising:
an inner conductor arranged in a first layer;
a pair of outer conductors comprising a first outer conductor and a second outer conductor; and
a pair of slotted shields comprising a first slotted shield and a second slotted shield,
wherein the first slotted shield and the second slotted shield are arranged in a second layer with a spacing in between to form a section of a ground shield,
wherein the second layer is parallel to the first layer, and
wherein the first slotted shield is connected to the first outer conductor, and wherein the second slotted shield is connected to the second outer conductor.

### Claim 24

A method for transmitting a high frequency signal by use of a waveguide, the method comprising:
exciting an electromagnetic wave in a waveguide, which comprises an inner conductor, a pair of outer conductors, a pair of slotted shields with a spacing in between and a medium within the waveguide, such that a phase velocity or group velocity of the electromagnetic wave in the waveguide is smaller than, at least by a factor of 5/4, a phase velocity or group velocity of the electromagnetic wave in the medium.
