# US 2013/0154480 A1 · Hybrid plasma reactor

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- Number: US 2013/0154480 A1
- Document ID: US20130154480A1
- Status: Published application
- Kind: A1
- Application number: 13/687,067
- Filed: 2012-11-28
- Published: 2013-06-20
- Earliest claimed: 2011-11-28
- Assignees: Dae-Kyu Choi
- Inventors: Dae-Kyu CHOI
- Web page: https://patentgrep.com/patent/US20130154480A1

## CPC

- H05H 1/46: using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence)
- H05H 1/4652: {using inductive coupling means, e.g. coils}
- H05H 1/466: {using capacitive coupling means, e.g. electrodes}
- H05H 2242/26: Matching networks
- H05H: PLASMA TECHNIQUE (apparatus or processes specially adapted for producing X-rays H05G2/00); PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS

## Abstract

A hybrid plasma reactor includes a reactor body having a plasma discharge space, a gas inlet, and a gas outlet; a hybrid plasma source including a first hybrid electrode and a second hybrid electrode, which face each other while the reactor body is positioned therebetween and provide a current path having one or more turns, to be inductively and capacitively coupled to plasma formed in the plasma discharge space; and an alternating switching power supply for supplying plasma generation power to the first hybrid electrode and the second hybrid electrode. The hybrid plasma reactor can complexly generate capacitively coupled plasma and inductively coupled plasma, thereby achieving a wide operation area from a low-pressure area to a high-pressure area.

## Claims

### Claim 1

A hybrid plasma reactor comprising:
a reactor body having a plasma discharge space, a gas inlet, and a gas outlet;
a hybrid plasma source including a first hybrid electrode and a second hybrid electrode, which face each other while the reactor body is positioned therebetween and provide a current path having one or more turns, to be inductively and capacitively coupled to plasma formed in the plasma discharge space; and
an alternating switching power supply for supplying plasma generation power to the first hybrid electrode and the second hybrid electrode.

### Claim 2 (depends on 1)

The hybrid plasma reactor according to claim 1, further comprising a magnetic core for focusing a magnetic field created by the current path having one or more turns provided by the first hybrid electrode and the second hybrid electrode.

### Claim 3 (depends on 1)

The hybrid plasma reactor according to claim 1, wherein the reactor body has a hollow ring-shaped structure.

### Claim 4 (depends on 1)

The hybrid plasma reactor according to claim 1, further comprising an insulation member installed between the fast hybrid electrode and the second hybrid electrode.

### Claim 5 (depends on 1)

The hybrid plasma reactor according to claim 1, wherein the reactor body is formed of a dielectric material.

### Claim 6 (depends on 1)

The hybrid plasma reactor according to claim 1, wherein the first hybrid electrode and the second hybrid electrode are electrically connected to each other.

### Claim 7 (depends on 1)

The hybrid plasma reactor according to claim 1, wherein the first hybrid electrode and the second hybrid electrode are not electrically connected to each other.

### Claim 8 (depends on 1)

The hybrid plasma reactor according to claim 1, further comprising a switching circuit connected between the first hybrid electrode and the second hybrid electrode.

### Claim 9 (depends on 1)

The hybrid plasma reactor according to claim 1, further comprising an inductor or a capacitor connected between the first hybrid electrode and the second hybrid electrode.

### Claim 10 (depends on 1)

The hybrid plasma reactor according to claim 1, further comprising a resistance connected between the first hybrid electrode and the second hybrid electrode.

### Claim 11 (depends on 1)

The hybrid plasma reactor according to claim 1, wherein the first hybrid electrode and the second hybrid electrode comprises a cooling channel.

### Claim 12 (depends on 1)

The hybrid plasma reactor according to claim 1, wherein the first hybrid electrode and the second hybrid electrode comprise multiple overlapped electrode plates for forming the current path having one or more turns.