# US 2013/0154443 A1 · Piezoelectric material, piezoelectric element, liquid ejection head, ultrasonic motor, and dust removing device

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- Number: US 2013/0154443 A1
- Document ID: US20130154443A1
- Status: Published application
- Kind: A1
- Application number: 13/715,510
- Filed: 2012-12-14
- Published: 2013-06-20
- Earliest claimed: 2011-12-19
- Assignees: Canon Kabushiki Kaisha
- Inventors: Kaoru Miura; Makoto Kubota; Jumpei Hayashi; Takayuki Watanabe
- Web page: https://patentgrep.com/patent/US20130154443A1

## CPC

- H10N 30/853: Ceramic compositions
- B08B 7/028: {Using ultrasounds}
- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- H02N 2/106: {Langevin motors}
- H02N 2/163: {Motors with ring stator}
- H10N 30/8536: {Alkaline earth metal based oxides, e.g. barium titanates}
- B41J 2202/03: Specific materials used
- Y10T 428/265: 1 mil or less
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A piezoelectric material contains a perovskite oxynitride expressed by the General Formula: In the formula, x, y, z and w are numerical values satisfying the relationships: 0≦x≦1, 0≦y≦1, 0<z<⅓, and 0<w≦z. Also, z can be 0.1≦z≦0.2. The piezoelectric material may be in the form of a film having a thickness in the range of 200 nm to 10 μm that is disposed on a substrate. The perovskite oxynitride may have a tetragonal crystal structure. (Ba1-xSrx)(Ti1-3z(Nb1-yTay)3z)(O1-wNw)3

## Claims

### Claim 1

A piezoelectric material comprising:
a perovskite oxynitride expressed by the General Formula:
(Ba1-xSrx)(Ti1-3z(Nb1-yTay)3z)(O1-wNw)3
wherein x, y, z and w represent numerical values satisfying the relationships 0≦x≦1, 0≦y≦1, 0<z<⅓, and 0<w≦z.

### Claim 2 (depends on 1)

The piezoelectric material according to claim 1, wherein z satisfies the relationship 0.1≦z≦0.2.

### Claim 3 (depends on 1)

The piezoelectric material according to claim 1, wherein the piezoelectric material is in the form of a film having a thickness in the range of 200 nm to 10 μm that is disposed on a substrate.

### Claim 4 (depends on 1)

The piezoelectric material according to claim 1, wherein the perovskite oxynitride has a tetragonal crystal structure.

### Claim 5 (depends on 1)

A piezoelectric element comprising:
a piezoelectric member made of the piezoelectric material as set forth in claim 1; and
a pair of electrodes in contact with the piezoelectric member.

### Claim 6 (depends on 5)

A liquid ejection head comprising the piezoelectric element as set forth in claim 5.

### Claim 7 (depends on 5)

An ultrasonic motor comprising the piezoelectric element as set forth in claim 5.

### Claim 8 (depends on 5)

A dust removing device comprising the piezoelectric element as set forth in claim 5.