# US 2013/0154419 A1 · Sliding member and fluid dynamic pressure bearing apparatus

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- Number: US 2013/0154419 A1
- Document ID: US20130154419A1
- Status: Published application
- Kind: A1
- Application number: 13/712,503
- Filed: 2012-12-12
- Published: 2013-06-20
- Earliest claimed: 2011-12-19
- Assignees: Minebea Co., Ltd.
- Inventors: Shinichi NIWA; Eiji FUJIMOTO; Toshiaki ASAKAWA
- Web page: https://patentgrep.com/patent/US20130154419A1

## CPC

- F16C 32/0662: {Details of hydrostatic bearings independent of fluid supply or direction of load}
- F16C 17/107: {with at least one surface for radial load and at least one surface for axial load}
- F16C 32/0629: {supported by a liquid cushion, e.g. oil cushion}
- F16C 33/043: {Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]}
- H02K 7/08: Structural association with bearings
- F16C 2206/04: Diamond like carbon [DLC]
- F16C 2223/60: by vapour deposition, e.g. PVD, CVD
- F16C 2240/64: in the nanometer range
- F16C 2370/12: Hard disk drives or the like
- F16C: SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- H02K: DYNAMO-ELECTRIC MACHINES (dynamo-electric relays H01H53/00; conversion of DC or AC input power into surge output power {H03K3/53})

## Abstract

There is provided a sliding member including: a substrate; and a protective film provided on the substrate, wherein the protective film is composed only of a metal base layer provided on the substrate, a low-hardness diamond-like carbon layer provided as a single layer on the metal base layer, and a high-hardness diamond-like carbon layer provided as a single layer directly on the low-hardness diamond-like carbon layer. The sliding member has the protective film which has excellent frictional wear resistance property and satisfactory adhesion property to the substrate, regardless of having a simple structure.

## Claims

### Claim 1

A sliding member comprising:
a substrate; and
a protective film provided on the substrate, the protective film consisting of a metal base layer provided on the substrate, one low-hardness diamond-like carbon layer provided on the metal base layer and one high-hardness diamond-like carbon layer provided directly on the low-hardness diamond-like carbon layer.

### Claim 2 (depends on 1)

The sliding member according to claim 1, wherein the high-hardness diamond-like carbon layer has a homogenous structure within the high-hardness diamond-like carbon layer; and
the low-hardness diamond-like carbon layer has a columnar structure extending in a thickness direction of the low-hardness diamond-like carbon layer.

### Claim 3 (depends on 1)

The sliding member according to claim 1, wherein a ratio of a thickness of the high-hardness diamond-like carbon layer with respect to a total of the thickness of the high-hardness diamond-like carbon layer and a thickness of the low-hardness diamond-like carbon layer is 75% to 95%.

### Claim 4 (depends on 1)

The sliding member according to claim 1, wherein a hardness of the high-hardness diamond-like carbon layer is not less than 28 GPa.

### Claim 5 (depends on 1)

The sliding member according to claim 1, wherein a hardness of the low-hardness diamond-like carbon layer is not more than 17 GPa.

### Claim 6 (depends on 1)

The sliding member according to claim 1, wherein both of the high-hardness and low-hardness diamond-like carbon layers do not contain hydrogen.

### Claim 7 (depends on 1)

The sliding member according to claim 1, which is usable for a fluid dynamic pressure bearing apparatus.

### Claim 8 (depends on 7)

The sliding member according to claim 7, which is usable for a fluid dynamic pressure bearing apparatus for a spindle motor of a hard disk drive.

### Claim 9 (depends on 7)

The sliding member according to claim 7, wherein a groove, along which a fluid used in the fluid dynamic pressure bearing apparatus flows, is formed on a surface of the substrate; and
the protective film is formed in the groove.

### Claim 10 (depends on 1)

A fluid dynamic pressure bearing apparatus comprising the sliding member as defined in claim 1.

### Claim 11 (depends on 10)

The fluid dynamic pressure bearing apparatus according to claim 10, which is usable for a spindle motor of a hard disk drive.

### Claim 12

A sliding member, comprising:
a substrate; and
a protective film provided on the substrate, the protective film consisting of a metal base layer, a first diamond-like carbon layer which has a columnar structure extending in a thickness direction of the first diamond-like carbon layer and which is formed on the metal base layer, and a second diamond-like carbon layer which has a homogeneous structure and which is formed on the first diamond-like carbon layer.

### Claim 13 (depends on 12)

The sliding member according to claim 12, wherein a ratio of a thickness of the second diamond-like carbon layer with respect to total of the thickness of the second diamond-like carbon layer and a thickness of the first diamond-like carbon layer is 75% to 95%.

### Claim 14 (depends on 12)

The sliding member according to claim 12, wherein both of the first and second diamond-like carbon layers do not contain hydrogen.

### Claim 15 (depends on 12)

The sliding member according to claim 12, which is usable for a fluid dynamic pressure bearing apparatus.

### Claim 16 (depends on 15)

The sliding member according to claim 15, which is usable for a fluid dynamic pressure bearing apparatus for a spindle motor of a hard disk drive.

### Claim 17 (depends on 15)

A fluid dynamic pressure bearing apparatus comprising the sliding member as defined in claim 15.

### Claim 18 (depends on 17)

The fluid dynamic pressure bearing apparatus according to claim 17, which is usable for a spindle motor of a hard disk drive.

### Claim 19 (depends on 11)

A spindle motor apparatus of a hard disk drive comprising the fluid dynamic pressure bearing according to claim 11.

### Claim 20 (depends on 18)

A spindle motor apparatus of a hard disk drive comprising the fluid dynamic pressure bearing according to claim 18.
