# US 2013/0154066 A1 · Semiconductor package and manufacturing method thereof

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- Number: US 2013/0154066 A1
- Document ID: US20130154066A1
- Status: Published application
- Kind: A1
- Application number: 13/739,565
- Filed: 2013-01-11
- Published: 2013-06-20
- Earliest claimed: 2012-04-12
- Assignees: Amkor Technology, Inc.
- Inventors: Dong In Kim; Jae Ung Lee; Eunnara Cho; Min Ju Kim
- Web page: https://patentgrep.com/patent/US20130154066A1

## CPC

- H10W 42/20: protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
- H10W 95/00: Packaging processes not covered by the other groups of this subclass
- H04R 19/005: {using semiconductor materials}
- H04R 19/04: Microphones (H04R19/01 takes precedence)
- H10W 90/753: {between laterally-adjacent chips}
- H10W 90/754: {between a chip and a stacked insulating package substrate, interposer or RDL}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K)

## Abstract

A semiconductor package is presented which has a suitable structure for effectively shielding electromagnetic wave interference (EMI) in a cavity area to which a semiconductor chip is attached. The semiconductor package is assembled such that a lower substrate to which the semiconductor chip is attached is adhered to an EMI shielding & electric I/O body having various types of EMI shielding & electric I/O metal patterns by soldering. Further, the EMI shielding & electric I/O body is adhered to an upper substrate by soldering thereby simplifying assembling of the semiconductor package.

## Claims

### Claim 1

A semiconductor package comprising:
a lower substrate;
a semiconductor chip coupled to a cavity area of the lower substrate;
an electromagnetic wave interference (EMI) shielding & electric input/output (I/O) body formed to surround the cavity area and coupled to the lower substrate by soldering; and
an upper substrate coupled to the EMI shielding & electric I/O body by soldering,
wherein the EMI shielding & electric I/O body comprises:
an EMI shielding & electric I/O hole formed to pass through top and bottom portions of the EMI shielding & electric I/O body; and
a first EMI shielding & electric I/O metal pattern coupled to an inner wall of the EMI shielding & electric I/O hole and portions of the top and bottom portions of the EMI shielding & electric I/O body, and comprising a first lower metal pattern coupled to the lower substrate by soldering and a first upper metal pattern coupled to the upper substrate by soldering.

### Claim 2 (depends on 1)

The semiconductor package of claim 1, wherein the EMI shielding & electric I/O hole is one of a plurality of EMI shielding & electric I/O holes arranged in constant intervals in the EMI shielding & electric I/O body.

### Claim 3 (depends on 1)

The semiconductor package of claim 1, wherein the EMI shielding & electric I/O body further comprises a filler that fills the inside of the EMI shielding & electric I/O hole.

### Claim 4 (depends on 3)

The semiconductor package of claim 3, wherein the filler comprises a material selected from the group consisting of a conductive paste and a non-conductive material.

### Claim 5 (depends on 1)

The semiconductor package of claim 1 further comprising:
a second EMI shielding & electric I/O metal pattern coupled to inner sidewalls facing the cavity area and portions of the top and bottom portions of the EMI shielding & electric I/O body.

### Claim 6 (depends on 5)

The semiconductor package of claim 5, wherein the EMI shielding & electric I/O hole is one of a plurality of EMI shielding & electric I/O holes arranged in constant intervals in the EMI shielding & electric I/O body.

### Claim 7 (depends on 5)

The semiconductor package of claim 5, wherein the second metal pattern includes a second lower metal pattern coupled to a corresponding surface of the lower substrate, and a second upper metal pattern coupled to a corresponding surface of the upper substrate.

### Claim 8 (depends on 1)

The semiconductor package of claim 1 further comprising:
a second EMI shielding & electric I/O metal pattern coupled to outer sidewalls back-facing the cavity area and portions of the top and bottom portions of the EMI shielding & electric I/O body.

### Claim 9 (depends on 8)

The semiconductor package of claim 8, wherein the second metal pattern comprises a second lower metal pattern coupled to a corresponding surface of the lower substrate, and a second upper metal pattern coupled to a corresponding surface of the upper substrate.

### Claim 10 (depends on 8)

The semiconductor package of claim 8, wherein the EMI shielding & electric I/O body further comprises a filler that fills the inside of the EMI shielding & electric I/O hole.

### Claim 11 (depends on 10)

The semiconductor package of claim 10, wherein the filler comprises a material selected from the group consisting of a conductive paste and a non-conductive material.

### Claim 12

A semiconductor package comprising:
a lower substrate;
a semiconductor chip coupled to a cavity area of the lower substrate;
an electromagnetic wave interference (EMI) shielding & electric input/output (I/O) body formed to surround the cavity area and coupled to the lower substrate by soldering; and
an upper substrate coupled to the EMI shielding & electric I/O body by soldering,
wherein the EMI shielding & electric I/O body comprises:
a first EMI shielding & electric I/O hole formed to pass through top and bottom portions of the EMI shielding & electric I/O body;
a first EMI shielding & electric I/O metal pattern coupled to an inner wall of the EMI shielding & electric I/O hole and portions of the top and bottom portions of the EMI shielding & electric I/O body and comprising a first lower metal pattern coupled to the lower substrate by soldering, and a first upper metal pattern coupled to the upper substrate by soldering; and
a second EMI shielding & electric I/O hole;
a second EMI shielding & electric I/O metal pattern comprising conductive paste filling the second EMI shielding & electric I/O hole, the second EMI shielding & electric I/O metal pattern further comprising a second lower metal pattern coupled to the lower substrate by soldering and a second upper metal pattern coupled to the upper substrate by soldering.

### Claim 13 (depends on 12)

The semiconductor package of claim 12, wherein the first and second EMI shielding & electric I/O holes comprise a plurality of first and second EMI shielding & electric I/O holes arranged in constant intervals in the EMI shielding & electric I/O body.

### Claim 14 (depends on 13)

The semiconductor package of claim 13, wherein the plurality of second EMI shielding & electric I/O holes are arranged to cross the plurality of first EMI shielding & electric I/O holes.

### Claim 15 (depends on 12)

The semiconductor package of claim 12, wherein the plurality of second EMI shielding & electric I/O holes are formed at the outside back-facing the cavity area in view of the first EMI shielding & electric I/O holes.

### Claim 16

A semiconductor package comprising:
a lower substrate;
an electromagnetic wave interference (EMI) shielding & electric input/output (I/O) body comprising:
a top surface;
a bottom surface;
inner sidewalls defining a cavity;
a first EMI shielding & electric I/O hole extending through the EMI shielding & electric I/O body from the top surface to the bottom surface; and
a first EMI shielding & electric I/O metal pattern at least partially filling the first EMI shielding & electric I/O hole, the first EMI shielding & electric I/O metal pattern comprising:
a first lower metal pattern coupled to the bottom surface; and
a first upper metal pattern coupled to the top surface;
a first lower solder coupling the first lower metal pattern to the lower substrate;
an upper substrate; and
a first upper solder coupling the first upper metal pattern to the upper substrate.

### Claim 17 (depends on 16)

The substrate of claim 16 wherein the EMI shielding & electric I/O body further comprises:
a second EMI shielding & electric I/O metal pattern coupled to the inner sidewalls, the second EMI shielding & electric I/O metal pattern comprising:
a second lower metal pattern coupled to the bottom surface; and
a second upper metal pattern coupled to the top surface;
a second lower solder coupling the second lower metal pattern to the lower substrate; and
a second upper solder coupling the second upper metal pattern to the upper substrate.

### Claim 18 (depends on 17)

The substrate of claim 17 wherein the second EMI shielding & electric I/O metal pattern is coupled to the entire inner sidewalls.

### Claim 19 (depends on 16)

The substrate of claim 16 wherein the EMI shielding & electric I/O body further comprises:
outer sidewalls facing away from the cavity;
a second EMI shielding & electric I/O metal pattern coupled to the outer sidewalls, the second EMI shielding & electric I/O metal pattern comprising:
a second lower metal pattern coupled to the bottom surface; and
a second upper metal pattern coupled to the top surface;
a second lower solder coupling the second lower metal pattern to the lower substrate; and
a second upper solder coupling the second upper metal pattern to the upper substrate.

### Claim 20 (depends on 19)

The substrate of claim 19 wherein the second EMI shielding & electric I/O metal pattern is coupled to the entire outer sidewalls.
