# US 2013/0153807 A1 · Slit valve having increased flow uniformity > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0153807 A1 - Document ID: US20130153807A1 - Status: Published application - Kind: A1 - Application number: 13/764,204 - Filed: 2013-02-11 - Published: 2013-06-20 - Earliest claimed: 2008-05-05 - Assignees: Applied Materials, Inc. - Inventors: CHANDRASEKHAR BALASUBRAMANYAM; HELDER LEE; MIRIAM SCHWARTZ; ELIZABETH WU; KEDARNATH SANGAM - Web page: https://patentgrep.com/patent/US20130153807A1 ## CPC - F16K 15/147: {the closure elements having specially formed slits or being of an elongated easily collapsible form} - C23C 16/4401: {Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber} - C23C 16/45519: {Inert gas curtains} - F16K 51/02: specially adapted for high-vacuum installations - H10P 72/3406: {involving removal of lid, door or cover} - F16K: VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING {(devices for emptying and evacuating the excess liquid in valves or conduits F16L55/07)} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Methods and apparatus for increasing flow uniformity are provided herein. In some embodiments, a slit valve having increased flow uniformity may be provided, the slit valve may include a housing having an opening disposed therethrough, the opening configured to allow a substrate to pass therethrough; a gas inlet formed in the housing; an outer plenum disposed in the housing and coupled to the gas inlet; an inner plenum disposed in the housing and coupled to the outer plenum via a plurality of holes; and a plurality of gas outlets disposed in the housing and fluidly coupling the opening to the inner plenum. ## Claims ### Claim 1 A slit valve, comprising: a housing having an opening disposed therethrough, the opening configured to allow a substrate to pass therethrough; a gas inlet formed in the housing; a plenum disposed in the housing and coupled to the gas inlet; a plurality of gas outlets disposed in the housing and fluidly coupling the opening to the plenum; and a counterbore disposed on a plenum side of one or more of the gas outlets. ### Claim 2 (depends on 1) The slit valve of claim 1, wherein the plenum has a volume that varies along a longitudinal length of the plenum. ### Claim 3 (depends on 2) The slit valve of claim 2, wherein the volume of the plenum increases in a direction moving away from the gas inlet. ### Claim 4 (depends on 1) The slit valve of claim 1, wherein the plurality of gas outlets further comprise a plurality of zones, each zone comprising one or more gas outlets having a volume that is different than a volume of gas outlets disposed in at least one other zone. ### Claim 5 (depends on 4) The slit valve of claim 4, wherein a diameter of the plurality of gas outlets increases from zone-to-zone of the plurality of zones in a direction moving away from the gas inlet. ### Claim 6 (depends on 4) The slit valve of claim 4, wherein gas outlets within each zone of the plurality of zones each comprise a counterbore, and wherein the counterbores in any given zone have a volume that is different than a volume of counterbores disposed in at least one other zone. ### Claim 7 (depends on 6) The slit valve of claim 6, wherein a diameter of the counterbores increases from zone-to-zone of the plurality of zones in a direction moving away from the gas inlet. ### Claim 8 (depends on 1) The slit valve of claim 1, wherein at least one gas outlet has a volume that is different than a volume of at least one other gas outlet. ### Claim 9 (depends on 1) The slit valve of claim 1, further comprising a plurality of counterbores, one each in a plenum side of each of the one or more of the gas outlets, wherein at least one counterbore has a volume that is different than a volume of at least one other counterbore. ### Claim 10 (depends on 1) The slit valve of claim 1, wherein the plurality of gas outlets comprises up to about 96 gas outlets. ### Claim 11 (depends on 1) The slit valve of claim 1, wherein the plurality of gas outlets are arranged in one or more rows. ### Claim 12 (depends on 1) The slit valve of claim 1, wherein the housing includes a recess disposed proximate the opening and a plate disposed atop the recess to define the plenum. ### Claim 13 (depends on 12) The slit valve of claim 12, wherein the plurality of gas outlets are disposed within a lower surface of the recess between the opening and the plenum. ### Claim 14 An apparatus for processing a substrate, comprising: a process chamber; and a slit valve coupled to the process chamber, the slit valve comprising: a housing having an opening disposed therethrough, the opening configured to allow a substrate to pass therethrough; a gas inlet formed in the housing; a plenum disposed in the housing and coupled to the gas inlet; a plurality of gas outlets disposed in the housing and fluidly coupling the opening to the plenum; and a counterbore disposed on a plenum side of one or more of the gas outlets. ### Claim 15 (depends on 14) The apparatus of claim 14, wherein the plenum has a volume that varies along a longitudinal length of the plenum. ### Claim 16 (depends on 14) The apparatus of claim 14, wherein the plurality of gas outlets further comprise a plurality of zones, each zone comprising one or more gas outlets having a volume that is different than a volume of gas outlets disposed in at least one other zone. ### Claim 17 (depends on 14) The apparatus of claim 14, wherein at least one gas outlet has a volume that is different than a volume of at least one other gas outlet. ### Claim 18 (depends on 14) The apparatus of claim 14, further comprising a plurality of counterbores, one each in a plenum side of each of the one or more of the gas outlets, wherein at least one counterbore has a volume that is different than a volume of at least one other counterbore. ### Claim 19 (depends on 14) The apparatus of claim 14, wherein the process chamber further comprises a gas source coupled the gas inlet to provide a process gas to the opening of the slit valve through the plurality of gas outlets. ### Claim 20 (depends on 14) The apparatus of claim 14, further comprising a door configured to selectively open or close the slit valve to isolate an inner volume of the process chamber.