# US 2013/0153793 A1 · Electromagnetic radiation generating element, electromagnetic radiation generating device, and method of generating electromagnetic radiation

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- Number: US 2013/0153793 A1
- Document ID: US20130153793A1
- Status: Published application
- Kind: A1
- Application number: 13/621,051
- Filed: 2012-09-15
- Published: 2013-06-20
- Earliest claimed: 2011-12-19
- Assignees: Osaka University; Dainippon Screen Mfg. Co., Ltd.
- Inventors: Hidetoshi NAKANISHI; Masayoshi TONOUCHI
- Web page: https://patentgrep.com/patent/US20130153793A1

## CPC

- G01N 21/64: Fluorescence; Phosphorescence
- G01N 21/63: optically excited
- G01N 21/9501: {Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)}
- G01N 21/956: Inspecting patterns on the surface of objects {(contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)}
- G02F 1/015: based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction (G02F1/03 takes precedence)
- G02F 1/0126: {Opto-optical modulation, i.e. control of one light beam by another light beam, not otherwise provided for in this subclass}
- G02F 1/0152: {using free carrier effects, e.g. plasma effect}
- G02F 2201/122: having a particular pattern
- G02F 2201/30: grating
- G02F 2202/12: photoconductor
- G02F 2203/13: involving THZ radiation
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

An electromagnetic radiation generating device is a device that generates electromagnetic wave pulses from a plane surface. The electromagnetic radiation generating device includes an electromagnetic radiation generating element, a light irradiating unit. The electromagnetic radiation generating element includes: a depletion layer forming body formed by stacking a p-type silicon layer and an n-type silicon layer in a planar pattern; a light receiving surface electrode formed on one surface of the depletion layer forming body, the light receiving surface electrode including a plurality of parallel electrode parts that are equally spaced while a forming distance is maintained between the parallel electrode parts, the forming distance corresponding to the wavelength of the electromagnetic wave pulses generated from the depletion layer forming body; and a rear surface electrode formed on the opposite surface of the depletion layer forming body.

## Claims

### Claim 1

An electromagnetic radiation generating element that generates an electromagnetic wave pulse in response to irradiation with pulsed light, the electromagnetic radiation generating element comprising:
a depletion layer forming body that forms a depletion layer by stacking a p-type semiconductor layer and an n-type semiconductor layer in a planar pattern;
a light receiving surface electrode formed on one surface of said depletion layer forming body, the light receiving surface electrode including a plurality of parallel electrode parts that are equally spaced while a forming distance is maintained between the parallel electrode parts, the forming distance corresponding to the wavelength of said electromagnetic wave pulse generated from said depletion layer forming body; and
a rear surface electrode formed on the opposite surface of said depletion layer forming body.

### Claim 2 (depends on 1)

The electromagnetic radiation generating element according to claim 1, further comprising a reverse bias voltage applying circuit that applies a voltage to bring said depletion layer into a reverse biased condition through said light receiving surface electrode and said rear surface electrode.

### Claim 3 (depends on 1)

The electromagnetic radiation generating element according to claim 1, wherein said light receiving surface electrode includes a plurality of crossed electrode parts crossing said parallel electrode parts, the crossed electrode parts being equally spaced while a distance in agreement with said forming distance is maintained between the crossed electrode parts.

### Claim 4 (depends on 1)

The electromagnetic radiation generating element according to claim 1, wherein said rear surface electrode includes a plurality of opposite electrode parts opposite said parallel electrode parts and spaced from each other.

### Claim 5 (depends on 1)

The electromagnetic radiation generating element according to claim 1, wherein said forming distance is from 0.3 mm to 30 mm.

### Claim 6 (depends on 1)

The electromagnetic radiation generating element according to claim 1, wherein said forming distance is from 0.6 mm to 3 mm.

### Claim 7

An electromagnetic radiation generating device that generates electromagnetic radiation from a plane surface, comprising:
an electromagnetic radiation generating element including: a depletion layer forming body that forms a depletion layer by stacking a p-type semiconductor layer and an n-type semiconductor layer in a planar pattern; a light receiving surface electrode formed on one surface of said depletion layer forming body, the light receiving surface electrode including a plurality of parallel electrode parts that are equally spaced while a forming distance is maintained between the parallel electrode parts, the forming distance corresponding to the wavelength of said electromagnetic radiation generated from said depletion layer forming body; and a rear surface electrode formed on the opposite surface of said depletion layer forming body;
a light irradiating unit that emits pulsed light toward said electromagnetic radiation generating element; and
a reverse bias voltage applying circuit that applies a voltage to bring said depletion layer formed in said depletion layer forming body into a reverse biased condition through said light receiving surface electrode and said rear surface electrode.

### Claim 8 (depends on 7)

The electromagnetic radiation generating device according to claim 7, wherein said light irradiating unit includes a scanning section that scans said electromagnetic radiation generating element with said pulsed light.

### Claim 9 (depends on 8)

The electromagnetic radiation generating device according to claim 8, wherein said scanning section applies said pulsed light to points along each of said parallel electrode parts, and applies said pulsed light for a required period of time at intervals in agreement with said forming distance.

### Claim 10

A method of generating electromagnetic radiation from a plane surface, comprising the steps of:
(a) emitting pulsed light; and
(b) applying said pulsed light to an electromagnetic radiation generating element to generate electromagnetic radiation from a plane surface from the electromagnetic radiation generating element, the electromagnetic radiation generating element including: a depletion layer forming body that forms a depletion layer by stacking a p-type semiconductor layer and an n-type semiconductor layer in a planar pattern; a light receiving surface electrode formed on one surface of said depletion layer forming body; and a rear surface electrode formed on the opposite surface of said depletion layer forming body,
said step (b) including the step of
(b-1) applying a voltage to bring said depletion layer formed in said depletion layer forming body into a reverse biased condition through said light receiving surface electrode and said rear surface electrode.

### Claim 11 (depends on 10)

The method according to claim 10, wherein said step (b) includes the step of
(b-2) scanning said electromagnetic radiation generating element with said pulsed light.

### Claim 12 (depends on 11)

The method according to claim 11, wherein in said step (b-2), said pulsed light is applied to points along each of said parallel electrode parts, and said pulsed light is applied for a required period of time at intervals in agreement with a forming distance corresponding to the wavelength of said electromagnetic radiation generated from said depletion layer forming body.