# US 2013/0153792 A1 · Droplet generator steering system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0153792 A1 - Document ID: US20130153792A1 - Status: Published application - Kind: A1 - Application number: 13/328,628 - Filed: 2011-12-16 - Published: 2013-06-20 - Earliest claimed: 2011-12-16 - Assignees: Cymer, Inc. - Inventors: Peter M. Baumgart; J. Martin Algots; Abhiram Govindaraju; Chirag Rajyaguru - Web page: https://patentgrep.com/patent/US20130153792A1 ## CPC - H05G 2/0092: {Housing of the apparatus for producing X-rays; Environment inside the housing} - F16C 11/12: incorporating flexible connections, e.g. leaf springs - H05G 2/0027: {Arrangements for controlling the supply; Arrangements for measurements} - G21K 5/00: Irradiation devices (discharge tubes for irradiating H01J37/00) - G21K 5/08: Holders for targets or for other objects to be irradiated - Y10T 403/54: Flexible member is joint component - H05G: X-RAY TECHNIQUE (investigating or analysing materials by the use of X-rays G01N23/00; apparatus for X-ray photography G03B42/02; X-ray tubes H01J35/00; TV systems having X-ray input H04N5/321) - F16C: SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS - G21K: HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract Steering system for a droplet generator in a EUV system. The steering system permits controlled positioning of a droplet release point of the droplet generator. A movable member holding the droplet generator is coupled to stationary elements of the EUV system through a coupling system having a first subsystem that constrains lateral translation of the movable member, and a second subsystem that controls a relative inclination of the movable member. The first and second subsystems preferably include one or a combination of flexures that permit highly precise and repeatable positioning. ## Claims ### Claim 1 Apparatus comprising: a first member adapted to be coupled to a frame; a second member adapted to receive a droplet generator; and a coupling system mechanically coupling the first member to the second member, wherein the coupling system comprises a first coupling subsystem configured to constrain lateral movement between the first member and the second member, and a second coupling subsystem adapted to control an inclination of the second member with respect to the first member. ### Claim 2 (depends on 1) Apparatus as claimed in claim 1 wherein the first coupling subsystem comprises a plurality of first coupling subsystem elements mechanically coupling said first member to said second member. ### Claim 3 (depends on 2) Apparatus as claimed in claim 2 wherein each of said first coupling subsystem elements comprises least one flexure. ### Claim 4 (depends on 1) Apparatus as claimed in claim 1 wherein said first member is substantially plate shaped. ### Claim 5 (depends on 1) Apparatus as claimed in claim 1 wherein said first member is substantially plate-shaped, and wherein said second member is substantially plate shaped and substantially parallel to said first member. ### Claim 6 (depends on 1) Apparatus as claimed in claim 1 wherein the second coupling subsystem comprises a plurality of second coupling subsystem elements mechanically coupling said first member to said second member. ### Claim 7 (depends on 6) Apparatus as claimed in claim 6 wherein each of said second coupling subsystem elements comprises at least one first flexure. ### Claim 8 (depends on 7) Apparatus as claimed in claim 7 wherein said at least one first flexure is a cartwheel flexure. ### Claim 9 (depends on 7) Apparatus as claimed in claim 7 wherein each of said second coupling subsystem elements comprises at least one second flexure coupled to said at least one first flexure. ### Claim 10 (depends on 9) Apparatus as claimed in claim 9 wherein said at least one second flexure is a parallelogram flexure. ### Claim 11 (depends on 7) Apparatus as claimed in claim 7 wherein each of second coupling subsystem elements comprises at least one linear motor coupled to said first member and to said first flexure. ### Claim 12 (depends on 11) Apparatus as claimed in claim 11 wherein each of said second coupling subsystem elements comprises at least one second flexure coupled to said at least one first flexure. ### Claim 13 (depends on 12) Apparatus as claimed in claim 12 wherein each of second coupling subsystem elements comprises at least piezoelectric element coupled to said second member and to said at least one second flexure. ### Claim 14 Apparatus comprising: a plate-shaped first member adapted to a coupled to a frame; a plate-shaped second member adapted to receive a droplet generator; and a coupling system mechanically coupling the first member to the second member, wherein the coupling system comprises a first coupling subsystem configured to constrain lateral movement between the first member and the second member, said first coupling subsystem including a plurality of first coupling subsystem elements, each of said first coupling subsystem elements comprising at least one flexure, and a second coupling subsystem adapted to control inclination of the second member with respect to the first member, said first coupling subsystem including a plurality of first coupling subsystem elements, each of said first coupling subsystem elements comprising at a linear combination of a stepper motor coupled to said first member, a first flexure coupled to said stepper motor, a second flexure coupled to said first flexure, and a piezoelectric actuator coupled to said second flexure and to said second member. ### Claim 15 Apparatus comprising: a first member adapted to a coupled to a frame; a second member adapted to receive a droplet generator; and a coupling system mechanically coupling the first member to the second member, wherein the coupling system comprises at least one flexure. ### Claim 16 Apparatus comprising: a source adapted to produce a target of a material in a liquid state; a laser adapted to irradiate said target to change a state of the material from said liquid state to a plasma state to produce EUV light in an irradiation region; an optical system adapted to convey said EUV light from said irradiation region to a workpiece; said source comprising a target generator and a target generator steering system coupled to the target generator, the target generator steering system including a first member adapted to be fixed relative to said irradiation region, a second member adapted to receive the target generator and adapted to be movable with respect to said irradiation region; and a coupling system mechanically coupling the first member to the second member, wherein the coupling system comprises at least one flexure. ### Claim 17 A product made using an apparatus comprising: a source adapted to produce a target of a material in a liquid state; a laser adapted to irradiate said target to change a state of the material from said liquid state to a plasma state to produce EUV light in an irradiation region; an optical system adapted to convey said EUV light from said irradiation region to a workpiece; said source comprising a target generator and a target generator steering system coupled to the target generator, the target generator steering system including a first member adapted to be fixed relative to said irradiation region, a second member adapted to receive the target generator and adapted to be movable with respect to said irradiation region; and a coupling system mechanically coupling the first member to the second member, wherein the coupling system comprises at least one flexure.