# US 2013/0153742 A1 · Arrangement for holding a particle beam apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0153742 A1 - Document ID: US20130153742A1 - Status: Published application - Kind: A1 - Application number: 13/329,822 - Filed: 2011-12-19 - Published: 2013-06-20 - Earliest claimed: 2011-12-19 - Inventors: Jürgen POMMERENKE; Matthias Langer - Web page: https://patentgrep.com/patent/US20130153742A1 ## CPC - H01J 37/02: Details - H01J 37/26: Electron or ion microscopes; Electron or ion diffraction tubes - H01J 2237/0216: Means for avoiding or correcting vibration effects - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract An arrangement for holding a particle beam device, in particular an electron beam device, on at least one base structure, includes at least one receiving unit, at least one damping unit which is to be positioned between the base structure and the receiving unit, at least one damping element being arranged at the receiving unit, and at least one holding element being arranged at the damping element. ## Claims ### Claim 1 Arrangement for holding a particle beam device on at least one base structure, comprising: at least one receiving unit, at least one damping unit which is to be positioned between the base structure and the receiving unit; at least one damping element being arranged at the receiving unit; and at least one holding element being arranged at the damping element. ### Claim 2 (depends on 1) The arrangement according to claim 1, wherein the damping element is arranged between the receiving unit and the holding element such that the holding element has no direct connection to the receiving unit. ### Claim 3 (depends on 1) The arrangement according to claim 1, wherein the holding element is arranged at least partly in the damping element. ### Claim 4 (depends on 3) The arrangement according to claim 3, wherein the holding element is an anchor element. ### Claim 5 (depends on 1) The arrangement according to claim 1, further comprising: at least a first holding element, at least a second holding element and at least a third holding element, wherein the first holding element, the second holding element and the third holding element are arranged at the receiving unit. ### Claim 6 (depends on 1) The arrangement according to claim 1, wherein the holding element is a cover element, and wherein the damping element is arranged between the cover element and the receiving unit. ### Claim 7 (depends on 6) The arrangement according to claim 6, wherein the cover element is a cover plate. ### Claim 8 (depends on 6) The arrangement according to claim 6, wherein the damping element comprises at least one surface, and wherein the cover element covers the surface at least partly. ### Claim 9 (depends on 1) The arrangement according to claim 1, wherein the damping element comprises at least one reinforcement element. ### Claim 10 (depends on 9) The arrangement according to claim 9, wherein the reinforcement element is arranged at the receiving unit. ### Claim 11 (depends on 6) The arrangement according to claim 6, wherein the damping element comprises at least one reinforcement element being arranged at the cover element. ### Claim 12 (depends on 1) The arrangement according to claim 1, wherein the receiving unit is U-shaped. ### Claim 13 (depends on 1) The arrangement according to claim 1, wherein the receiving unit is shaped like a bowl, and wherein the bowl is filled with the damping element at least partly. ### Claim 14 (depends on 1) The arrangement according to claim 1, wherein the receiving unit comprises at least a first wall unit, at least a second wall unit and at least a third wall unit, the first wall unit adjoins to the second wall unit and the second wall unit adjoins to the third wall unit, at least a first reinforcement unit is arranged at the first wall unit and the second wall unit, and wherein at least a second reinforcement unit is arranged at the second wall unit and the third wall unit. ### Claim 15 (depends on 1) The arrangement according to claim 1, wherein the damping element is made of one of: mineral casting, a polymer, lead casting and lead. ### Claim 16 (depends on 1) The arrangement according to claim 1, wherein the damping element comprises a first structural-borne sound damping, wherein the receiving unit comprises a second structural-borne sound damping and wherein the first structural-borne sound damping is higher than the second structural-borne sound damping. ### Claim 17 (depends on 1) The arrangement according to claim 1, wherein the receiving unit comprises at least one T-section. ### Claim 18 (depends on 1) The arrangement according to claim 1, wherein the receiving unit comprises at least one support unit which is arranged at the receiving unit. ### Claim 19 Particle beam device being held by an arrangement on at least one base structure, the arrangement comprising: at least one receiving unit; at least one damping unit which is to be positioned between the base structure and the receiving unit; at least one damping element being arranged at the receiving unit; and at least one holding element being arranged at the damping element. ### Claim 20 (depends on 19) The particle beam device according to claim 19, wherein the particle beam device is one of: an electron beam device, a transmission particle beam device, a scanning particle beam device and an ion beam device.