# US 2013/0153553 A1 · Apparatus and method for the interference patterning of planar samples > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0153553 A1 - Document ID: US20130153553A1 - Status: Published application - Kind: A1 - Application number: 13/684,915 - Filed: 2012-11-26 - Published: 2013-06-20 - Earliest claimed: 2011-11-24 - Assignees: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V. - Inventors: Andres Fabian LASAGNI - Web page: https://patentgrep.com/patent/US20130153553A1 ## CPC - B23K 26/364: for making a groove or trench, e.g. for scribing a break initiation groove - B23K 26/0604: {by a combination of beams} - B23K 26/0676: {into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations} - B23K 26/073: Shaping the laser spot - B23K 26/355: {Texturing} - B23K 26/361: for deburring or mechanical trimming (B23K26/351 takes precedence) - B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM ## Abstract Apparatus for interference patterning of a planar sample including a laser and a focusing arrangement positioned in a beam path of the laser so that the laser beam is imaged in a first spatial direction in a focused manner into a sample volume in which the planar sample is positioned. An expanding and splitting arrangement is positioned downstream of the focusing arrangement for the laser beam, whilst maintaining the focused imaging in a first spatial direction which can be expanded in a second spatial direction, and which can be split into two partial beams. These two partial beams can be directed onto the sample volume. ## Claims ### Claim 1 Apparatus for the interference patterning of a planar sample (P) comprising a laser (1), a focusing arrangement (2) positioned in the beam path of the laser (1), by means of which focusing arrangement the laser beam (L) can be imaged in a first spatial direction (y) in a focused manner into a sample volume (3) in which the planar sample (P) can be positioned or is positioned, an expanding and splitting arrangement (4) positioned downstream of the focusing arrangement (2) in the beam path, by means of which expanding and splitting arrangement the laser beam (L), whilst maintaining the focused imaging into the sample volume (3) in the first spatial direction (y) can be expanded in a second spatial direction (x, w), which is not parallel to the first spatial direction (y), and is preferably orthogonal to the first spatial direction (y), can be split into two partial beams (L1, L2) and in the form of these two partial beams (L1, L2) can be directed onto the sample volume (3) such that the two partial beams (L1, L2) interfere within the sample volume (3) in an interference region (5). ### Claim 2 (depends on 1) Apparatus according to claim 1, characterized in that the focusing arrangement (2) is a beam-cross-section-altering focusing arrangement (9), by means of which the laser beam (L) not only can be imaged in the first spatial direction (y) in a focused manner into the sample volume (3), but furthermore can also be altered, preferably expanded, with regard to its beam cross section. ### Claim 3 (depends on 2) Apparatus according to claim 2, characterized in that the laser beam (L), by means of the focusing arrangement (2) embodied as a beam-cross-section-altering focusing arrangement (9), can be altered, preferably expanded, with regard to its beam cross section in two spatial directions which are not parallel to one another, and are preferably orthogonal to one another, wherein these two spatial directions are preferably the first spatial direction (y) and the second spatial direction (x, w). ### Claim 4 (depends on 1) Apparatus according to claim 1, characterized in that the laser beam (L), by means of the focusing arrangement (2), can be imaged firstly also in a further spatial direction, which is not parallel to the first spatial direction (y) and which is preferably the second spatial direction (x, w), in a focused manner into the sample volume (3) before, by means of the expanding and splitting arrangement (4), it is then possible to cancel again the focusing in said further spatial direction for the purpose of expanding the beam path in the second spatial direction (x, w), whilst maintaining the focused imaging into the sample volume (3) in the first spatial direction (y). ### Claim 5 (depends on 1) Apparatus according to claim 1 characterized in that the expanding and splitting arrangement (4) comprises at least one cylindrical lens (6, 6a, 6b) for expanding the laser beam (L) or the two partial beams (L1, L2) in the second spatial direction (x, w), a beam splitter (7), in particular a semitransparent mirror, for splitting the laser beam (L) into the two partial beams (L1, L2) and/or one, two, three or more than three reflection elements (8a, 8b, 8c), in particular plane mirrors, in order to direct the two partial beams (L1, L2) onto the sample volume (3) such that they interfere within the sample volume (3) in the interference region (5). ### Claim 6 (depends on 1) Apparatus according to claim 1 characterized in that the focusing arrangement (2) is either a beam-cross-section-altering focusing arrangement (9) comprising a beam expander and/or a telescope and/or in that the beam cross section, in particular the diameter of the laser beam (L), can be altered, in particular expanded, in a variable manner by means of the focusing arrangement (2), or in that the focusing arrangement (2) is a focusing arrangement which does not alter the beam cross section and which preferably comprises at least one converging lens (12). ### Claim 7 (depends on 1) Apparatus according to claim 1 characterized in that the expanding and splitting arrangement (4) comprises in the beam path (L, L1, L2) firstly a first optical element, in particular a cylindrical lens (6), for bringing about the expanding in the second spatial direction (x, w), then comprises a second optical element, in particular a beam splitter (7), for splitting the laser beam (L) into the two partial beams (L1, L2), and finally comprises at least one, preferably a plurality of third optical element(s), in particular a plurality of reflection elements (8a, 8b, 8c), in order to direct the two partial beams (L1, L2) onto the sample volume (3) such that they interfere within the sample volume (3) in the interference region (5). ### Claim 8 (depends on 7) Apparatus according to claim 7, characterized in that the first optical element comprises a convex cylindrical lens (6) and images the beam path (L) onto the second optical element comprising a beam splitter (7), wherein preferably the focal length fcyl of the cylindrical lens (6) is less than the distance in the beam path (L, L1, L2) between the cylindrical lens (6) and the beam splitter (7) and also the distance in the beam path (L, L1, L2) between the cylindrical lens (6), on the one hand, and the location of the focus (F) in the sample volume (3) in the first spatial direction (y), on the other hand, is greater than the focal length fcyl of the cylindrical lens (6) by more than the factor 2, preferably by at least the factor 5, preferably by at least the factor 10. ### Claim 9 (depends on 7) Apparatus according to claim 7, characterized in that the first optical element comprises a convex cylindrical lens (6) and images the beam path (L) onto the second optical element comprising a beam splitter (7), wherein preferably the focal length fcyl of the cylindrical lens (6) is greater than the distance in the beam path (L, L1, L2) between the cylindrical lens (6) and the beam splitter (7) and also the distance dcyl-foc in the beam path (L, L1, L2) between the cylindrical lens (6), on the one hand, and the location of the focus (F) in the sample volume (3) in the first spatial direction (y), on the other hand, is greater than the focal length fcyl of the cylindrical lens (6) by more than the factor 2, preferably by at least the factor 5, preferably by at least the factor 10. ### Claim 10 (depends on 7) Apparatus according to claim 7, characterized in that the first optical element comprises a concave cylindrical lens (6) for the expanding imaging of the beam path (L) onto the second optical element comprising a beam splitter (7). ### Claim 11 (depends on 1) Apparatus according to claim 1, characterized in that the expanding and splitting arrangement (4) comprises in the beam path (L, L1, L2) firstly a first optical element, in particular a beam splitter (7), for splitting the laser beam (L) into the two partial beams (L1, L2), then comprises at least one, preferably a plurality of second optical element(s), in particular a plurality of reflection elements (8a, 8b, 8c), in order to direct the two partial beams (L1, L2) onto the sample volume (3) such that they interfere within the sample volume (3) in the interference region (5), and finally comprises two third optical elements, in particular two cylindrical lenses (6a, 6b), for bringing about the expanding in the second spatial direction (x, w) in each of the two partial beams (L1, L2). ### Claim 12 (depends on 11) Apparatus according to claim 11, characterized in that the two third optical elements are preferably identically embodied convex cylindrical lenses (6a, 6b) which in each case image one of the two partial beams (L1, L2) into the sample volume (3), while preferably for both cylindrical lenses (6a, 6b) the focal length fcyl thereof is in each case less than the distance in the respective partial beam path (L1, L2) between the respective cylindrical lens (6a, 6b), on the one hand, and the location of the focus (F) in the sample volume (3) in the first spatial direction (y), on the other hand, by more than the factor 2, preferably at least the factor 5, preferably at least the factor 10. ### Claim 13 (depends on 11) Apparatus according to claim 11, characterized in that the two third optical elements are preferably identically embodied concave cylindrical lenses (6a, 6b) which in each case image one of the two partial beams (L1, L2) into the sample volume (3). ### Claim 14 (depends on 1) Apparatus according to claim 1 characterized by a movement unit (10), in particular a conveyor belt or a roller-based transport apparatus, by means of which the sample (P) or sections thereof can be moved in the sample volume (3) or through the sample volume (3), preferably be moved in the first spatial direction (y), and/or in that the focusing arrangement (2), the expanding and splitting arrangement (4) and/or parts of at least one of these two arrangements (2, 4) is/are designed to deflect the laser beam (L) and/or the two partial beams (L1, L2) originating therefrom relative to the planar sample (P) arranged in a stationary manner and/or by an integration of the apparatus into a production installation or production line. ### Claim 15 (depends on 1) Apparatus according to claim 1 characterized by a pulsed laser which emits in the ultraviolet range, in the visible range or in the infrared range, preferably an Nd:YAG-Laser having a wavelength of 355 nm, and/or a laser having an energy per laser pulse of between 1 nJ and 50 J, having a pulse frequency of between 1 Hz and 500 MHz and/or having a pulse half-width of between 1 fs and 100 ms. ### Claim 16 (depends on 1) Method for the interference patterning of a planar sample (P), wherein the method is carried out by means of an apparatus according to claim 1. ### Claim 17 (depends on 1) Use of an apparatus or of a method according to claim 1 for the interference patterning of a film as sample (P) and/or of a sample (P) in a roll-to-roll configuration.