# US 2013/0153431 A1 · Methods and apparatus for sorting and/or depositing nanotubes > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0153431 A1 - Document ID: US20130153431A1 - Status: Published application - Kind: A1 - Application number: 13/770,669 - Filed: 2013-02-19 - Published: 2013-06-20 - Earliest claimed: 2005-09-01 - Assignees: Micron Technology, Inc. - Inventors: Gurtej S. Sandhu - Web page: https://patentgrep.com/patent/US20130153431A1 ## CPC - C25D 15/00: Electrolytic or electrophoretic production of coatings containing embedded materials, e.g. particles, whiskers, wires - B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites - C25D 13/02: with inorganic material - B82Y 99/00: Subject matter not provided for in other groups of this subclass - C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract Methods and apparatus for forming devices using nanotubes. In one embodiment, an apparatus for depositing nanotubes onto a workpiece comprises a vessel configured to contain a deposition fluid having a plurality of nanotubes including first nanotubes having a first characteristic and second nanotubes having a second characteristic. The apparatus further includes a sorting unit in the vessel configured to selectively isolate or otherwise sort the first nanotubes from the second nanotubes, and a field unit in the vessel configured to attach the first nanotubes to the workpiece. For example, the field unit can attach the first nanotubes to the workpiece such that the first nanotubes are at least generally parallel to each other and in a desired orientation relative to the workpiece. ## Claims ### Claim 1 A method of depositing nanotubes onto a workpiece, comprising: providing a deposition fluid containing first nanotubes having a first characteristic and second nanotubes having a second characteristic; isolating the first nanotubes from the second nanotubes in the deposition fluid; and arranging the first nanotubes on the workpiece such that the first nanotubes are at least generally parallel to each other and in a desired orientation relative to the workpiece. ### Claim 2 (depends on 1) The method of claim 1 wherein isolating the first nanotubes from the second nanotubes comprises filtering the second nanotubes from the first nanotubes. ### Claim 3 (depends on 1) The method of claim 1 wherein isolating the first nanotubes from the second nanotubes comprises sorting the first nanotubes from the second nanotubes in the deposition fluid. ### Claim 4 (depends on 3) The method of claim 3 wherein sorting the first nanotubes from the second nanotubes comprises passing the first nanotubes through a mesh that filters out the second nanotubes. ### Claim 5 (depends on 3) The method of claim 3 wherein sorting the first nanotubes from the second nanotubes comprises applying an energy field to the deposition fluid that acts on the second nanotubes differently than the first nanotubes. ### Claim 6 (depends on 1) The method of claim 1 wherein arranging the first nanotubes on the workpiece comprises electrochemically depositing the first nanotubes onto the workpiece. ### Claim 7 (depends on 6) The method of claim 6 wherein electrochemically depositing the first nanotubes onto the workpiece comprises establishing an electrical field between a surface of the workpiece and a counter-electrode in the deposition fluid. ### Claim 8 An apparatus for depositing nanotubes onto a workpiece, comprising: a vessel configured to contain a deposition fluid having a plurality of nanotubes; a workpiece holder configured to hold a surface of the workpiece in a deposition zone relative to the vessel, wherein the workpiece holder has an electrical contact configured to provide an electrical potential to the workpiece; a counter-electrode in the vessel; and a nanotube separator in the vessel configured to sort a first portion of the nanotubes from a second portion of the nanotubes. ### Claim 9 (depends on 8) The apparatus of claim 8 wherein the nanotube separator comprises a field generator configured to generate an energy field in the deposition fluid that acts on the second portion of the nanotubes differently than the first portion of the nanotubes. ### Claim 10 (depends on 9) The apparatus of claim 9 wherein the field generator comprises a first separator electrode and a second separator electrode, and wherein the first and second separator electrodes are configured to contact the deposition fluid. ### Claim 11 (depends on 9) The apparatus of claim 9 wherein the field generator comprises an electromagnet in the vessel. ### Claim 12 (depends on 9) The apparatus of claim 9 wherein the field generator is located at a sorting zone upstream from the deposition zone relative to a flow of the deposition fluid through the vessel. ### Claim 13 (depends on 9) The apparatus of claim 9 wherein the field generator is located in the vessel. ### Claim 14 (depends on 8) The apparatus of claim 8 wherein the nanotube separator comprises a filter in the vessel. ### Claim 15 (depends on 14) The apparatus of claim 14 wherein the filter comprises a mesh configured to filter out the second portion of the nanotubes from the first portion of the nanotubes. ### Claim 16 (depends on 8) The apparatus of claim 8 wherein the nanotube separator comprises a patterned mask having openings through which the first portion of the nanotubes can pass to deposit the first portion of the nanotubes onto the workpiece. ### Claim 17 (depends on 8) The apparatus of claim 8 wherein the first portion of the nanotubes comprises first nanotubes having a first characteristic and the second portion of the nanotubes comprises second nanotubes having a second characteristic, and wherein the nanotube separator comprises a field generator configured to generate an energy field that acts on the first nanotubes differently than the second nanotubes.