# US 2013/0153418 A1 · Sensing device and fabricating method thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0153418 A1 - Document ID: US20130153418A1 - Status: Published application - Kind: A1 - Application number: 13/443,902 - Filed: 2012-04-11 - Published: 2013-06-20 - Earliest claimed: 2011-12-16 - Assignees: Industrial Technology Research Institute - Inventors: Lung-Tai Chen; Chin-Sheng Chang; Jing-Yuan Lin; Chun-Hsun Chu - Web page: https://patentgrep.com/patent/US20130153418A1 ## CPC - B81C 1/00293: {maintaining a controlled atmosphere with processes not provided for in B81C1/00285} - B81C 2203/0145: Hermetically sealing an opening in the lid - B81C 2203/019: characterised by the material or arrangement of seals between parts - G01D 11/26: Windows; Cover glasses; Sealings therefor - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) - G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR ## Abstract A sensing device is provided. A suction port of a chamber is sealed by using a gas sealing layer with a gas sealing filter. The gas sealing filter has a plurality of one-way passes. The one-way passes have a width in a range of several nanometers to several hundred nanometers. A gas molecular exhausts to the outside of the chamber through the one-way passes. Owing to preventing the material of gas sealing layer from flowing into the chamber by the gas sealing filter, superior sealing performance is achieved as compared to those adopting solder or sealing material, thereby facilitating control of the condition in the chamber. ## Claims ### Claim 1 A sensing device, comprising: a housing, comprising at least one exhaust vent, wherein the exhaust vent penetrates through a first surface and a second surface of the housing; a gas sealing filter, at least covering the exhaust vent, wherein the gas sealing filter comprises at least one pass having a section in the shape of an irregular curve, the pass penetrates through the gas sealing filter; a gas sealing layer, at least covering the exhaust vent and a part of the gas sealing filter; and a sensing element, disposed in the housing. ### Claim 2 (depends on 1) The sensing device according to claim 1, further comprising: a rigid support member, disposed between the housing and the gas sealing filter, wherein the rigid support member at least covers the exhaust vent, the rigid support member comprises at least one opening, the opening penetrates through the rigid support member, and the exhaust vent, the pass and the opening are in communication with one another. ### Claim 3 (depends on 2) The sensing device according to claim 2, wherein the gas sealing filter is disposed on the first surface of the housing. ### Claim 4 (depends on 3) The sensing device according to claim 3, wherein the rigid support member is disposed on the first surface of the housing. ### Claim 5 (depends on 2) The sensing device according to claim 2, wherein the gas sealing filter is disposed on the second surface of the housing. ### Claim 6 (depends on 5) The sensing device according to claim 5, wherein the rigid support member is disposed on the second surface of the housing. ### Claim 7 (depends on 1) The sensing device according to claim 1, wherein the sensing element is selected from a group consisting of a resonant magnetic field sensor, a resonator, a Radio Frequency (RF) switch, a micro bolometer and a gyroscope. ### Claim 8 (depends on 1) The sensing device according to claim 1, wherein the material of the gas sealing filter is selected from a group consisting of metal, ceramic and polymer. ### Claim 9 (depends on 1) The sensing device according to claim 1, wherein the exhaust vent is disposed at a top portion or a side wall of the housing. ### Claim 10 (depends on 1) The sensing device according to claim 1, wherein the housing comprises: a first substrate; and a second substrate, covering the first substrate, wherein at least one of the first substrate and the second substrate has a recessed portion, a chamber is formed through the recessed portion between the second substrate and the first substrate, the exhaust vent is disposed on at least one of the first substrate and the second substrate, and the sensing element is disposed in the chamber. ### Claim 11 (depends on 10) The sensing device according to claim 10, further comprising: a rigid support member, disposed between the housing and the gas sealing filter, wherein the rigid support member at least covers the exhaust vent, the rigid support member comprises at least one opening, the opening penetrates through the rigid support member, and the exhaust vent, the pass and the opening are in communication with one another. ### Claim 12 (depends on 11) The sensing device according to claim 11, wherein the gas sealing filter is disposed on the first surface of the housing. ### Claim 13 (depends on 12) The sensing device according to claim 12, wherein the rigid support member is disposed on the first surface of the housing. ### Claim 14 (depends on 11) The sensing device according to claim 11, wherein the gas sealing filter is disposed on the second surface of the housing. ### Claim 15 (depends on 14) The sensing device according to claim 14, wherein the rigid support member is disposed on the second surface of the housing. ### Claim 16 (depends on 1) The sensing device according to claim 1, wherein the gas sealing layer at least covers a part of the pass, and a width of the pass is in a range of several nanometers to several hundred nanometers. ### Claim 17 A fabricating method of a sensing device, comprising: forming a sensing element on a first substrate; forming an exhaust vent on a second substrate, wherein the exhaust vent penetrates through a first surface and a second surface of the second substrate; forming a gas sealing filter on the second substrate, wherein the gas sealing filter comprises at least one pass having a section in the shape of an irregular curve, the pass penetrates through the gas sealing filter, and a width of the pass is in a range of several nanometers to several hundred nanometers; bonding the second substrate on the first substrate, wherein the first substrate and/or the second substrate comprises a recessed portion, and a chamber is formed between the second substrate and the first substrate; and forming a gas sealing layer on the second substrate to seal the chamber, wherein the gas sealing layer at least covers the exhaust vent, a part of the gas sealing filter and a part of the pass. ### Claim 18 (depends on 17) The fabricating method of a sensing device according to claim 17, further comprising: forming a rigid support member between the second substrate and the gas sealing filter, wherein the rigid support member at least covers the exhaust vent, the rigid support member comprises at least one opening, the opening penetrates through the rigid support member, and the exhaust vent, the pass and the opening are in communication with one another. ### Claim 19 (depends on 18) The fabricating method of a sensing device according to claim 18, wherein the gas sealing filter is formed on the first surface of the second substrate. ### Claim 20 (depends on 19) The fabricating method of a sensing device according to claim 19, wherein the rigid support member is formed on the first surface of the second substrate. ### Claim 21 (depends on 18) The fabricating method of a sensing device according to claim 18, wherein the gas sealing filter is dispose on the second surface of the second substrate. ### Claim 22 (depends on 21) The fabricating method of a sensing device according to claim 21, wherein the rigid support member is dispose on the second surface of the second substrate. ### Claim 23 (depends on 17) The fabricating method of a sensing device according to claim 17, wherein the sensing element is a resonant magnetic field sensor, a resonator, a Radio Frequency (RF) switch, a micro bolometer, or a gyroscope. ### Claim 24 (depends on 17) The fabricating method of a sensing device according to claim 17, wherein the material of the gas sealing filter is one selected from a group consisting of metal, ceramic and polymer. ### Claim 25 (depends on 17) The fabricating method of a sensing device according to claim 17, wherein a fabricating method of the gas sealing filter comprises: providing a bi-metal alloy; and dealloying the bi-metal alloy. ### Claim 26 (depends on 17) The fabricating method of a sensing device according to claim 17, wherein a method for forming the gas sealing layer is selected from a group consisting of a physical vapor deposition and a chemical vapor deposition.