# US 2013/0153201 A1 · Thermal diffusion chamber with cooling tubes

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- Number: US 2013/0153201 A1
- Document ID: US20130153201A1
- Status: Published application
- Kind: A1
- Application number: 13/769,433
- Filed: 2013-02-18
- Published: 2013-06-20
- Earliest claimed: 2010-12-30
- Assignees: Poole Ventura, Inc.
- Inventors: Mark R. Erickson; Henry J. Poole; Nader Jamshidi; Arthur W. Custer, III; Aaron L. Dingus
- Web page: https://patentgrep.com/patent/US20130153201A1

## CPC

- F28F 27/00: Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus (control arrangements in general G05)
- F28F 1/00: Tubular elements; Assemblies of tubular elements (specially adapted for movement F28F5/00)
- H10P 72/0434: {mainly by convection}
- H10P 72/0462: {characterised by the construction of the processing chambers, e.g. modular processing chambers}
- F28C 3/005: {one heat-exchange medium being a solid (F28C3/10 takes precedence)}
- F28D 1/0477: {the conduits being bent in a serpentine or zig-zag}
- F28D 2021/0077: {for tempering, e.g. with cooling or heating circuits for temperature control of elements}
- F28F 1/32: the means having portions engaging further tubular elements
- F28F: DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION (water and air traps, air venting F16)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- F28C: HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA COME INTO DIRECT CONTACT WITHOUT CHEMICAL INTERACTION (safety devices in general F16P; fluid heaters having heat generating means F24H; with an intermediate heat-transfer medium coming into direct contact with heat-exchange media F28D15/00 - F28D19/00; details of heat-exchange apparatus of general application F28F)
- F28D: HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT (fluid heaters having heat generating means and heat transferring means F24H; furnaces F27; details of heat-exchange apparatus of general)

## Abstract

Preferably, a frame supporting a containment chamber, which in turn confines a sealed process chamber, is provided. Further, at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber is presented, in which the fluid inlet box includes at least a flow adjustment structure to control a fluid flow from a fluid source around the exterior of the sealed process chamber; and an open loop heat exchange system in fluidic communication with an interior of the sealed process chamber is present, within at least a portion of the open loop heat exchange system resides internal to the sealed process chamber.

## Claims

### Claim 1

An apparatus comprising:
a frame supporting a containment chamber;
a sealed process chamber confined within the containment chamber;
at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the fluid inlet box including at least a flow adjustment structure to control a fluid flow from a fluid source around the exterior of the sealed process chamber; and
an open loop heat exchange system in fluidic communication with an interior of the sealed process chamber, wherein the open loop heat exchange system includes cooling tubes that extend into the sealed process chamber.

### Claim 2 (depends on 1)

The apparatus of claim 1, further comprising:
a heat source module disposed between the containment chamber and the process chamber; and
a thermal sensor assembly disposed within an interior of the sealed process chamber contactingly adjacent a wall of the sealed thermal chamber, the thermal sensor assembly measures an internal temperature value of the sealed process chamber, and wherein the cooling tubes extend into the sealed process chamber a distance less than to a mid-point along the length of the sealed process chamber.

### Claim 3 (depends on 1)

The apparatus of claim 1, further comprising a controller communicating with the flow adjustment structure and the thermal sensor assembly, the controller sets a flow position of the flow adjustment structure to regulate fluid flow from the fluid source, through the fluid inlet box, and around the exterior of the sealed process chamber in response to the measured internal temperature value of the sealed process chamber, and wherein the cooling tubes extend into the sealed process chamber a distance to a mid-point portion of the sealed process chamber, along the length of the sealed process chamber.

### Claim 4 (depends on 1)

The apparatus of claim 1, in which the open loop heat exchange system comprising:
an inlet manifold communicating with a collar secured to said sealed process chamber, wherein said collar is adjacent an open end of said sealed process chamber; and
an outlet manifold communicating with said collar and offset from said inlet manifold, and wherein the cooling tubes extend into the sealed process chamber a distance beyond a mid-point portion of the sealed process chamber, along the length of the sealed process chamber.

### Claim 5 (depends on 1)

The apparatus of claim 1, in which the cooling tubes of the open loop heat exchange system comprising:
an inlet cooling tube adjacent an interior surface of said sealed process chamber; and
an outlet cooling tube adjacent said interior surface of said sealed process chamber and offset from said inlet cooling tube, and wherein each the inlet cooling tube and the outlet cooling tube extend a distance adjacent a mid-point portion of the sealed process chamber, along the length of the sealed process chamber.

### Claim 6 (depends on 1)

The apparatus of claim 1, in which the open loop heat exchange system comprising:
an inlet header adjacent an exterior surface of a collar secured to said sealed process chamber, wherein said collar is further adjacent an end of said containment chamber; and
an outlet header adjacent said end of said containment chamber and offset from said inlet header.

### Claim 7 (depends on 1)

The apparatus of claim 1, in which the open loop heat exchange system comprising:
an inlet accumulator adjacent an exterior surface of said containment chamber; and
an outlet accumulator adjacent said exterior surface of said containment chamber and offset from said inlet accumulator.

### Claim 8 (depends on 1)

The apparatus of claim 1, in which the open loop heat exchange system comprising:
a fluid supply conduit adjacent an exterior surface of said containment chamber; and
a fluid return conduit adjacent said exterior surface of said containment chamber and offset from said fluid supply conduit.

### Claim 9 (depends on 1)

The apparatus of claim 1, in which the open loop heat exchange system comprising, a heat exchanger adjacent an exterior surface of said containment chamber, and in which said heat exchanger comprises:
a heat exchange core;
a coolant input port communicating with said heat exchange core;
a coolant output port communicating with said heat exchange core and offset from said coolant input port;
a fluid input port in fluid communication with said heat exchange core; and
a fluid output port in fluid communication with said heat exchange core and offset from said fluid input port.

### Claim 10 (depends on 1)

The apparatus of claim 1, in which the open loop heat exchange system comprising, a fluid handling unit for exchanging fluid contained internal to said sealed process chamber.

### Claim 11

An apparatus comprising:
a frame supporting a containment chamber;
a sealed process chamber confined within the containment chamber;
at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the fluid inlet box including at least a flow adjustment structure to control a fluid flow from a fluid source around the exterior of the sealed process chamber;
an open loop heat exchange system in fluidic communication with an interior of the sealed process chamber;
a controller communicating with the flow adjustment structure; and
a control signal buss communicating with at least the flow adjustment structure, and the controller, the control signal buss sends a control signal to the flow adjustment structure in response to measured internal temperature value of an interior of said sealed process chamber, wherein the open loop heat exchange system includes cooling tubes that extend into the sealed process chamber.

### Claim 12 (depends on 11)

The apparatus of claim 11, in which the open loop heat exchange system comprising:
an inlet manifold communicating with a collar secured to said sealed process chamber, wherein said collar is adjacent an open end of said sealed process chamber; and
an outlet manifold communicating with said collar and offset from said inlet manifold.

### Claim 13 (depends on 12)

The apparatus of claim 12, in which the open loop heat exchange system further comprising:
an inlet cooling tube adjacent an interior surface of said sealed process chamber; and
an outlet cooling tube adjacent said interior surface of said sealed process chamber and offset from said inlet cooling tube.

### Claim 14 (depends on 13)

The apparatus of claim 13, in which the open loop heat exchange system further comprising:
an inlet header adjacent an exterior surface of a collar secured to said sealed process chamber, wherein said collar is further adjacent an end of said containment chamber; and
an outlet header adjacent said end of said containment chamber and offset from said inlet header.

### Claim 15 (depends on 14)

The apparatus of claim 14, in which the open loop heat exchange system further comprising:
an inlet accumulator adjacent an exterior surface of said containment chamber; and
an outlet accumulator adjacent said exterior surface of said containment chamber and offset from said inlet accumulator.

### Claim 16 (depends on 15)

The apparatus of claim 15, in which the open loop heat exchange system further comprising:
a fluid supply conduit adjacent an exterior surface of said containment chamber; and
a fluid return conduit adjacent said exterior surface of said containment chamber and offset from said fluid supply conduit.

### Claim 17 (depends on 16)

The apparatus of claim 16, in which the open loop heat exchange system further comprising, a heat exchanger adjacent an exterior surface of said containment chamber, and in which said heat exchanger comprises:
a heat exchange core;
a coolant input port communicating with said heat exchange core;
a coolant output port communicating with said heat exchange core and offset from said coolant input port;
a fluid input port with said heat exchange core; and
a fluid output port communicating with said heat exchange core and offset from said fluid input port.

### Claim 18 (depends on 17)

The apparatus of claim 17, in which the open loop heat exchange system further comprising, a fluid handling unit for exchanging a fluid contained internal to said sealed process chamber.

### Claim 19 (depends on 18)

The apparatus of claim 18, in which the open loop heat exchange system further comprising;
a first isolation valve disposed between said fluid supply conduit and said fluid handling unit; and
a second isolation valve disposed between said fluid return conduit and said fluid handling unit.

### Claim 20 (depends on 18)

The apparatus of claim 18, in which the open loop heat exchange system further comprising;
a first set of thermal dispersion baffles secured to said inlet manifold; and
a second set of thermal dispersion baffles secured to said outlet manifold, wherein said first and said second thermal dispersion baffles mitigate transfer of heat from internal said sealed process chamber to a door sealing said sealed process chamber.
