# US 2013/0153194 A1 · Heat-conducting element, assembly and use of the same

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- Number: US 2013/0153194 A1
- Document ID: US20130153194A1
- Status: Published application
- Kind: A1
- Application number: 13/703,856
- Filed: 2011-06-09
- Published: 2013-06-20
- Earliest claimed: 2010-06-12
- Assignees: Schneeberger Holding AG
- Inventors: Hans-Martin Schneeberger; Martin Vix; Urs Schumacher
- Web page: https://patentgrep.com/patent/US20130153194A1

## CPC

- F28F 7/00: Elements not covered by group F28F1/00, F28F3/00 or F28F5/00
- H10W 40/774: {Pistons, e.g. spring-loaded members}
- F28D 21/00: Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28F 13/00: Arrangements for modifying heat-transfer, e.g. increasing, decreasing (F28F1/00 - F28F11/00 take precedence)
- F28F 2013/005: {Thermal joints}
- F28F: DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION (water and air traps, air venting F16)
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- F28D: HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT (fluid heaters having heat generating means and heat transferring means F24H; furnaces F27; details of heat-exchange apparatus of general)

## Abstract

The invention relates to a heat-conducting element (10) for arrangement between movable components (B1, B2) in a vacuum, comprising rolling elements (11), which are guided between two running surfaces (12, 13) that can be moved linearly relative to each other, and further comprising at least one supporting element (14), which is mounted so as to spring back elastically against one of the running surfaces (12) and which contacts said running surface (12) in such a manner that a thermal bridge exists between said supporting element (14) and the running surface (12). The invention further relates to an assembly (30) made of two components (B1, B2) which can be moved relative to each other, comprising at least one linear bearing (20) accommodated between said components (B1, B2), and at least one heat-conducting element (10) according to the invention, which is arranged between the components (B1, B2) in an elastically preloaded manner.

## Claims

### Claim at position 1

-10. (canceled)

### Claim 11

A heat-conducting element for arrangement between movable components in a vacuum, comprising rolling elements which are guided between two running surfaces that can be moved linearly relative to each other, and further comprising at least one supporting element which is mounted elastically springing back against one of the running surfaces and which is in contact with said running surface such that a thermal bridge exists between said supporting element and the running surface, wherein the rolling elements are arranged at a distance from each other which is less than half of their respective diameter.

### Claim 12 (depends on 1)

A heat-conducting element according to claim 1, in which the rolling elements have an elongated cylindrical shape.

### Claim 13 (depends on 1)

A heat-conducting element according to claim 1, in which the supporting element comprises at least one projecting part and one of the running surfaces comprises at least one opening allocated to said projecting part and/or vice versa, and the respective projecting part engages with or penetrates said opening.

### Claim 14 (depends on 1)

A heat-conducting element according to claim 1, in which the supporting element at least partly encompasses the running surface and/or the running surface at least partly encompasses the supporting element.

### Claim 15 (depends on 1)

A heat-conducting element according to claim 1, in which the supporting element consists of a metallic material.

### Claim 16 (depends on 1)

A heat-conducting element according to claim 1, in which at least one spring element is provided between the supporting element and the running surface.

### Claim 17 (depends on 1)

An assembly comprising two components which are movable relative to each other in a vacuum, having at least one linear bearing retained between said components and at least one heat-conducting element according to claim 1, arranged elastically pre-loaded between the components.

### Claim 18 (depends on 7)

An assembly according to claim 7, having a drive for moving at least one of the components relative to the respective other component, said drive being arranged between said two components.

### Claim 19 (depends on 8)

An assembly according to claim 8, in which the drive is arranged closer with respect to space to the at least one heat-conducting element than to the at least one linear bearing.

### Claim 20 (depends on 7)

A manufacturing device for wafers comprising an assembly according to claim 7.
