# US 2013/0153124 A1 · Large area dissolvable template lithography > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0153124 A1 - Document ID: US20130153124A1 - Status: Published application - Kind: A1 - Application number: 13/773,308 - Filed: 2013-02-21 - Published: 2013-06-20 - Earliest claimed: 2010-03-11 - Assignees: Applied Materials, Inc. - Inventors: Brian N. HUBERT - Web page: https://patentgrep.com/patent/US20130153124A1 ## CPC - B29C 59/026: {of layered or coated substantially flat surfaces} - B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic - B82Y 40/00: Manufacture or treatment of nanostructures - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - Y10T 156/17: Surface bonding means and/or assemblymeans with work feeding or handling means - B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A method and system for patterning a substrate are provided. A template is formed by applying a precursor material to a patterned master substrate and curing or solidifying the precursor material. The template is detached from the master substrate using a carrier having a curved surface. The template is coated with a patterning material, and is then detached from the carrier and applied to the substrate to be patterned. The template is then dissolved without affecting the patterning material, and the patterning material may thereafter be finished to develop the pattern. In an alternate embodiment, the patterning material may be applied to the substrate and then imprinted using the template. ## Claims ### Claim 1 A method of patterning a substrate, comprising: forming a template having a pattern to be applied to the substrate; attaching the template to a carrier having a curved surface; coating the template with a patterning material; applying the template coated with the patterning material to the substrate and detaching the template from the carrier; dissolving the template; and treating susceptible portions of the underlying substrate to change either the properties or the topography of the substrate. ### Claim 2 (depends on 1) The method of claim 1, wherein attaching the template to the carrier comprises: attaching the template at a first edge of the carrier; attaching the template at a second edge of the carrier; and rocking the carrier across the template from the first edge to the second edge of the carrier by rotating the carrier about an axis while translating the carrier in a direction perpendicular to the axis of rotation. ### Claim 3 (depends on 1) The method of claim 1, wherein detaching the template from the carrier comprises detaching the template at a first edge of the carrier, and then detaching the template at a second edge of the carrier. ### Claim 4 (depends on 1) The method of claim 1, further comprising: attaching a first edge of the template to a substrate support holding the substrate; rocking the carrier across the substrate from the first edge to the second edge of the carrier; and then attaching a second edge of the template to the substrate support. ### Claim 5 (depends on 1) The method of claim 1, wherein forming the template comprises: applying a template precursor to a master substrate; forming an attachment zone of the template by coating a landing zone of the master substrate with the template precursor; and then solidifying the template precursor. ### Claim 6 (depends on 1) The method of claim 1, wherein dissolving the template comprises exposing the template to a solvent that does not dissolve the patterning material. ### Claim 7 (depends on 1) The method of claim 1, further comprising applying one or more forces to aid in attaching the template to the carrier and detaching it from the carrier. ### Claim 8 (depends on 4) The method of claim 4, wherein attaching the template to the carrier having the curved surface, detaching the template from the carrier, and attaching the first and second edges of the template to the substrate support each independently comprises a process selected from the group consisting of melting, clamping, bonding, surface modification, electromagnetic adhesion and detachment, pneumatic adhesion and detachment, or any combination thereof. ### Claim 9 (depends on 1) The method of claim 1, further comprising removing the patterning material incrementally to expose portions of the substrate beneath the thinner portions of the patterning material, wherein portions of the substrate beneath the thicker portions of the patterning material remain covered. ### Claim 10 (depends on 1) The method of claim 1, further comprising altering the contact surface of the carrier to facilitate adhesion or release. ### Claim 11 (depends on 10) The method of claim 10, wherein the contact surface is roughened. ### Claim 12 A processing system for patterning substrates, comprising: a first plurality of master substrates, each master substrate containing a pattern to be transferred to one or more final substrates; a second plurality of carriers for moving flexible templates formed from the master substrates, each carrier having a curved template contact surface; and a third plurality of pattern transfer stations, each station having a substrate support, wherein each of the plurality of carriers moves between one or more master substrates and one or more pattern transfer stations. ### Claim 13 (depends on 12) The processing system of claim 12, wherein the second plurality is less than the third plurality, and the first plurality is less than the second plurality. ### Claim 14 (depends on 12) The processing system of claim 12, wherein each master substrate has a different pattern. ### Claim 15 (depends on 14) The processing system of claim 14, wherein each of the flexible templates have a different pattern which is transferred to each final substrate. ### Claim 16 (depends on 12) The processing system of claim 12, wherein each of the curved template contact surfaces is configured to connect with the flexible templates by a process selected from the group consisting of melting, clamping, bonding, surface modification, electromagnetic adhesion and detachment, pneumatic adhesion and detachment, or any combination thereof. ### Claim 17 (depends on 12) The processing system of claim 12, wherein each of the second plurality of carriers are configured to detach the template from the carrier by detaching the template at a first edge of the carrier, and then detaching the template at a second edge of the carrier. ### Claim 18 (depends on 12) The processing system of claim 12, further comprising a force delivery member included in each of the second plurality of carriers and configured to apply one or more forces for attaching and detaching the flexible templates. ### Claim 19 (depends on 12) The processing system of claim 12, wherein each of the curved template contact surfaces have a width and a radius of curvature, wherein a ratio of the radius of curvature to the width of the contact surface is at least about 10:1. ### Claim 20 (depends on 12) The processing system of claim 12, wherein each of the substrate supports comprises a landing zone configured to hold a template securely against the substrate support.