# US 2013/0153054 A1 · Combinatorial Processing Tool

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- Number: US 2013/0153054 A1
- Document ID: US20130153054A1
- Status: Published application
- Kind: A1
- Application number: 13/330,149
- Filed: 2011-12-19
- Published: 2013-06-20
- Earliest claimed: 2011-12-19
- Assignees: Intermolecular, Inc.
- Inventors: Kent Riley Child; Tony P. Chiang
- Web page: https://patentgrep.com/patent/US20130153054A1

## CPC

- B25B 11/005: {Vacuum work holders}
- H10P 72/0432: {mainly by conduction}
- H10P 72/7618: {characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel}
- H10P 72/7621: {characterised by supporting two or more semiconductor substrates}
- H10P 72/7624: {characterised by the mechanical construction of the susceptor, stage or support}
- Y10T 137/6851: With casing, support, protector or static constructional installations
- B25B: TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A combinatorial processing chamber is provided. The processing chamber includes a substrate support rotatable around a central axis. The substrate support has a plurality of subsections operable to be isolated from each other. The plurality of subsections has a rotatable support cell independently controllable from the substrate support. A vacuum source in fluid communication with a gap defined around a peripheral region of the substrate support is provided. The vacuum source is in fluid communication with a peripheral region of each rotatable support cell of the plurality of subsections.

## Claims

### Claim 1

A processing chamber, comprising:
a substrate support having a central axis,
the central axis being perpendicular to a plane of the substrate support,
the substrate support being rotatable around the central axis,
the substrate support having a plurality of subsections operable to be physically isolated from each other,
each of the plurality of subsections comprising a rotatable cell,
each rotatable cell independently controllable from the substrate support; and
a first gap defined around a peripheral region of the substrate support;
a plurality of second gaps, each second gap defined around a peripheral region of one of the rotatable cells;
a vacuum source in fluid communication with the first gap and each of the plurality of second gaps.

### Claim 2 (depends on 1)

The processing chamber of claim 1 wherein each of the plurality of subsections has independent temperature control.

### Claim 3 (depends on 1)

The processing chamber of claim 1, further comprising:
a coil disposed under the substrate support, the coil operable to generate a magnetic field when supplied with a current.

### Claim 4 (depends on 1)

The processing chamber of claim 1, further comprising:
a plurality of coils, each one of the plurality of coils disposed under a corresponding of the plurality of subsections of the substrate support, each of the plurality of coils independently operable to generate a magnetic field when supplied with a current.

### Claim 5 (depends on 4)

The processing chamber of claim 4, wherein each of the plurality of coils is independently moveable in a vertical direction.

### Claim 6 (depends on 1)

The processing chamber of claim 1, further comprising:
a lid operable to isolate each of the plurality of subsections from each other.

### Claim 7 (depends on 6)

The processing chamber of claim 6, wherein process fluids are supplied to the processing chamber through the lid.

### Claim 8 (depends on 1)

The processing chamber of claim 1, wherein each of the plurality of rotatable cells has independent temperature control.

### Claim 9 (depends on 1)

The processing chamber of claim 1, wherein each rotatable cell has a plurality of openings disposed around a peripheral region of each rotatable cell.

### Claim 10

A processing chamber, comprising:
a substrate support having a central axis,
the central axis being perpendicular to a plane of the substrate support,
the substrate support being rotatable around the central axis,
the substrate support having a plurality of subsections operable to be physically isolated from each other;
a plurality of coils,
each one of the plurality of coils disposed under a corresponding one of the plurality of subsections of the substrate support,
each of the plurality of coils independently operable to generate a magnetic field when supplied with a current; and
a channel disposed around a periphery of each of the plurality of subsections,
the channel operable to radiate heat away from an adjacent subsection.

### Claim 11 (depends on 10)

The chamber of claim 10, wherein each of the plurality of subsections have a rotatable cell independently controllable from the substrate support.

### Claim 12 (depends on 11)

The chamber of claim 11, further comprising:
a vacuum source in fluid communication with a first gap defined around a peripheral region of the substrate support, the vacuum source in fluid communication with a plurality of second gaps, the second gaps defined around a peripheral region of each of the rotatable cells.

### Claim 13 (depends on 10)

The chamber of claim 10, wherein each of the plurality of coils are independently moveable relative to a surface of the substrate support.

### Claim 14 (depends on 10)

The chamber of claim 10 further comprising:
a lid, the lid operable to isolate the plurality of subsections from each other.

### Claim 15 (depends on 10)

The chamber of claim 10, further comprising:
a first drive operable to rotate the substrate support; and
a plurality of second drives, each one of the plurality of second drives operable to rotate a corresponding one of the plurality of cells.

### Claim 16 (depends on 10)

The chamber of claim 10, wherein the channel is purged with a fluid.

### Claim 17 (depends on 11)

The chamber of claim 11, wherein each rotatable cell has a plurality of openings disposed around a peripheral region of each rotatable support cell.