# US 2013/0152856 A1 · Chemical bath deposition (cbd) apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0152856 A1 - Document ID: US20130152856A1 - Status: Published application - Kind: A1 - Application number: 13/452,933 - Filed: 2012-04-23 - Published: 2013-06-20 - Earliest claimed: 2011-12-14 - Assignees: Industrial Technology Research Institute - Inventors: Wei-Tse Hsu; Tung-Po Hsieh; Song-Yeu Tsai - Web page: https://patentgrep.com/patent/US20130152856A1 ## CPC - C23C 18/12: characterised by the deposition of inorganic material other than metallic material - B05C 3/02: the work being immersed in the liquid or other fluent material - C23C 18/1204: {inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds} - C23C 18/125: {Process of deposition of the inorganic material} - C23C 18/1283: {Control of temperature, e.g. gradual temperature increase, modulation of temperature} - C23C 18/1295: {with after-treatment of the deposited inorganic material} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08) ## Abstract A chemical bath deposition (CBD) apparatus includes a first cap, a second cap, and a solution input/output device. The second cap is arranged corresponding to the first cap so as to form a deposition space. The solution input/output device is located in the first cap so as to feed a solution into/out of the deposition space. The position of the solution input/output device is fixed, or the solution input/output device is movable in the deposition space. ## Claims ### Claim 1 A chemical bath deposition (CBD) apparatus, comprising: a first cap and a second cap, wherein the second cap is arranged corresponding to the first cap so as to form a deposition space; and a solution input/output device located in the first cap, wherein the position of the solution input/output device is fixed, or the solution input/output device is movable in the deposition space. ### Claim 2 (depends on 1) The CBD apparatus according to claim 1, further comprising a mixing device, arranged below the second cap. ### Claim 3 (depends on 2) The CBD apparatus according to claim 2, wherein the mixing device comprises a shaking unit. ### Claim 4 (depends on 2) The CBD apparatus according to claim 2, wherein the mixing device comprises a heating unit. ### Claim 5 (depends on 1) The CBD apparatus according to claim 1, further comprising a spacer located at an edge of the first cap or an edge of the second cap has, so that the deposition space is formed between the first cap and the second cap. ### Claim 6 (depends on 5) The CBD apparatus according to claim 5, wherein a material of the spacer comprises rubber, silicone, or polytetrafluoroethylene (PTFE). ### Claim 7 (depends on 5) The CBD apparatus according to claim 5, wherein the edge of the second cap or the first cap has a groove, and the spacer is arranged in the groove. ### Claim 8 (depends on 7) The CBD apparatus according to claim 7, wherein a shape of the groove comprises a round shape, a square shape, or an irregular shape. ### Claim 9 (depends on 1) The CBD apparatus according to claim 1, wherein the first cap further comprises a magnetic substance therein. ### Claim 10 (depends on 1) The CBD apparatus according to claim 1, wherein a material of the first cap comprises an aluminium alloy, glass, quartz, alumina, a polymer material, or a combination thereof. ### Claim 11 (depends on 10) The CBD apparatus according to claim 10, wherein the material of the first cap is a polymer, and the polymer material comprises polyvinyl chloride (PVC), PTFE, or polypropylene. ### Claim 12 (depends on 1) The CBD apparatus according to claim 1, wherein a material of the second cap comprises a glass substrate, a stainless steel substrate, or substrates of polyimide (PI) and various semiconductive materials. ### Claim 13 (depends on 1) The CBD apparatus according to claim 1, wherein the second cap is a substrate to be deposited. ### Claim 14 (depends on 1) The CBD apparatus according to claim 1, wherein a substrate to be deposited is capable of being arranged on the first cap in the deposition space. ### Claim 15 (depends on 1) The CBD apparatus according to claim 1, wherein the solution input/output device is capable of making a sprayed solution in a form of a mist, a film, or a pillar. ### Claim 16 (depends on 1) The CBD apparatus according to claim 1, wherein the solution input/output device is capable of spaying the solution in the deposition space at any angle. ### Claim 17 (depends on 1) The CBD apparatus according to claim 1, further comprising a tilt device, arranged below the second cap. ### Claim 18 (depends on 1) The CBD apparatus according to claim 1, wherein an outer edge of the first cap has an extension portion, for providing a height of the deposition space. ### Claim 19 (depends on 18) The CBD apparatus according to claim 18, wherein the solution input/output device comprises: at least one arm, connecting the extension portion of the first cap; at least one solution injection chamber, connecting the arm; and at least one solution pipe, located in the arm, for supplying a fluid to the solution injection chamber. ### Claim 20 (depends on 19) The CBD apparatus according to claim 19, wherein the arm is capable of performing stretching motion. ### Claim 21 (depends on 19) The CBD apparatus according to claim 19, wherein the solution injection chamber has at least one outlet/inlet. ### Claim 22 (depends on 21) The CBD apparatus according to claim 21, wherein the outlet/inlet comprises an embedded nozzle. ### Claim 23 (depends on 21) The CBD apparatus according to claim 21, wherein the outlet/inlet is located at any position in the solution input/output device.