# US 2013/0152684 A1 · Sensor for detecting acceleration and angular velocity > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0152684 A1 - Document ID: US20130152684A1 - Status: Published application - Kind: A1 - Application number: 13/772,638 - Filed: 2013-02-21 - Published: 2013-06-20 - Earliest claimed: 2009-05-26 - Assignees: Denso Corporation - Inventors: Keisuke GOTOH - Web page: https://patentgrep.com/patent/US20130152684A1 ## CPC - G01P 3/44: for measuring angular speed (G01P3/56 takes precedence) - G01C 19/5719: using planar vibrating masses driven in a translation vibration along an axis - G01P 15/125: by capacitive pick-up - G01P 15/14: by making use of gyroscopes (gyroscopes per se G01C19/00) - G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G}) - G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S) ## Abstract A sensor includes an acceleration detector, an angular velocity detector, a driver, and first to fourth springs. Each detector includes a pair of fixed electrodes, a pair of movable electrodes, and a pair of supporting members for supporting the movable electrodes. The driver causes the supporting members to vibrate in opposite phases in a first direction. The first spring couples the supporting members of the acceleration detector and has elasticity in a second direction perpendicular to the first direction. The second spring couples the supporting members of the acceleration detector to a base and has elasticity in both directions. The third spring couples the supporting members of the acceleration detector to the supporting members of the angular velocity detector and has elasticity in both directions. The fourth spring couples the supporting members to the movable electrodes of the angular velocity detector and has elasticity in the second direction. ## Claims ### Claim at position 1 1-10. (canceled) ### Claim 11 A sensor for detecting acceleration and angular velocity, the sensor comprising: a base; an acceleration detector including a pair of first fixed electrodes, a pair of first movable electrodes, a pair of weights, and a pair of first supporting members configured to support the pair of first movable electrodes and joined to the pair of weights; an angular velocity detector including a pair of second fixed electrodes, a pair of second movable electrodes, and a pair of second supporting members configured to support the pair of second movable electrodes; a driver configured to cause the pair of first supporting members to vibrate in opposite phases in a first direction and configured to cause the pair of second supporting members to vibrate in opposite phases in the first direction; a first spring configured to couple the pair of first supporting members together, the first spring having elasticity in the first direction; a second spring configured to couple the pair of first supporting members to the base, the second spring having elasticity in both the first direction and a second direction perpendicular to the first direction; a third spring configured to couple the pair of first supporting members to the pair of second supporting members, the third spring having elasticity in both the first direction and the second direction; a fourth spring configured to couple the pair of second supporting members to the pair of second movable electrodes, the fourth spring having elasticity in the second direction; and a fifth spring configured to couple the pair of second supporting members together, the fifth spring having elasticity in the first direction. ### Claim 12 (depends on 11) The sensor according to claim 11, wherein the acceleration is detected based on a change in a capacitance of a first capacitor due to inertial force, the first capacitor formed with the pair of first fixed electrodes and the pair of first movable electrodes, and the angular velocity is detected based on a change in a capacitance of a second capacitor due to inertial force, the second capacitor formed with the pair of second fixed electrodes and the pair of second movable electrodes. ### Claim 13 (depends on 11) The sensor according to claim 11, wherein each of the pair of first fixed electrodes and the pair of first movable electrodes has a comb-shape. ### Claim 14 (depends on 11) The sensor according to claim 11, wherein each of the pair of second fixed electrodes and the pair of second movable electrodes has a comb-shape. ### Claim 15 (depends on 11) The sensor according to claim 11, wherein the driver uses electrostatic force to cause the pair of first supporting members to vibrate in opposite phases in the first direction and to cause the pair of second supporting members to vibrate in opposite phases in the first direction. ### Claim 16 (depends on 15) The sensor according to claim 15, wherein the driver includes a comb electrode. ### Claim 17 (depends on 11) The sensor according to claim 11, wherein the driver uses electromagnetic force to cause the pair of first supporting members to vibrate in opposite phases in the first direction and to cause the pair of second supporting members to vibrate in opposite phases in the first direction. ### Claim 18 (depends on 11) The sensor according to claim 11, wherein the base is a semiconductor substrate, and the acceleration detector, the angular velocity detector, and the driver are integrated on the semiconductor substrate. ### Claim 19 (depends on 11) The sensor according to claim 11, wherein the pair of first supporting members has a rectangular C-shape. ### Claim 20 (depends on 11) The sensor according to claim 11, wherein the pair of second supporting members has a frame-shape.