# US 2013/0130045 A1 · Method of producing particles by physical vapor deposition in an ionic liquid

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- Number: US 2013/0130045 A1
- Document ID: US20130130045A1
- Status: Published application
- Kind: A1
- Application number: 13/740,369
- Filed: 2013-01-14
- Published: 2013-05-23
- Earliest claimed: 2006-01-17
- Assignees: PPG Industries Ohio, Inc.
- Inventors: James J. Finley
- Web page: https://patentgrep.com/patent/US20130130045A1

## CPC

- B22F 9/02: using physical processes
- B22F 1/054: Nanosized particles
- B22F 1/056: {Submicron particles having a size above 100 nm up to 300 nm}
- B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites
- C03C 17/09: by deposition from the vapour phase
- C03C 17/245: by deposition from the vapour phase
- C03C 17/36: at least one coating being a metal
- C03C 17/366: {Low-emissivity or solar control coatings}
- C23C 14/001: {Coating on a liquid substrate}
- C23C 14/083: {of refractory metals or yttrium}
- C23C 14/14: Metallic material, boron or silicon
- C23C 14/22: characterised by the process of coating
- C23C 14/28: by wave energy or particle radiation (C23C14/32 - C23C14/48 take precedence)
- C23C 14/48: Ion implantation
- B22F 2998/10: Processes characterised by the sequence of their steps
- C03C 2217/219: CrOx, MoOx, WOx
- C03C 2217/25: Metals
- C03C 2217/253: Cu
- C03C 2217/256: Ag
- C03C 2217/268: Other specific metals
- C03C 2218/156: by magnetron sputtering
- C03C 2218/34: Masking
- Y10T 428/31678: Of metal
- B22F: WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER (making alloys by powder metallurgy C22C); APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A method for forming a coating on an ionic liquid includes placing an ionic liquid on a surface of a substrate, thereby forming an ionic liquid coated substrate. The ionic liquid coated substrate is introduced into a physical deposition chamber having a physical deposition target. One or more materials are directed from the physical deposition target onto the ionic liquid of the ionic liquid coated substrate by physical vapor deposition to form a coating on the ionic liquid of the ionic liquid coated substrate.

## Claims

### Claim 1

A method for forming a coating on an ionic liquid, comprising the steps of:
placing an ionic liquid on a substrate, thereby forming an ionic liquid coated substrate,
introducing said ionic liquid coated substrate into a physical deposition chamber having at least one physical deposition target; and
directing one or more materials from the at least one physical deposition target onto the ionic liquid of the ionic liquid coated substrate by physical vapor deposition to form a coating on the ionic liquid of the ionic liquid coated substrate.

### Claim 2 (depends on 1)

The method of claim 1, including adjusting the viscosity of the ionic liquid.

### Claim 3 (depends on 2)

The method of claim 2, wherein the adjusting step is performed by adding one or more polymers or one or more monomers to the ionic liquid.

### Claim 4 (depends on 1)

The method of claim 1, wherein the coating is a multilayered coating.

### Claim 5 (depends on 4)

The method of claim 4, wherein the multilayered coating includes one or more oxide layers and one or more metal layers.

### Claim 6 (depends on 1)

The method of claim 1, further including evacuating the deposition chamber to provide a vacuum of no greater than 10 microns of Hg.

### Claim 7 (depends on 6)

The method of claim 6, wherein the deposition chamber is evacuated to provide a vacuum of no greater than 7 microns of Hg.

### Claim 8 (depends on 1)

The method of claim 1, wherein the ionic liquid comprises at least one cation selected from mono-, di-, and trisubstituted imidazoliums; substituted pyridiniums; substituted pyrrolidiniums; tetraalkyl phosphoniums; tetraalkyl ammoniums; guanidiniums; isouroniums; and thiouroniums.

### Claim 9 (depends on 1)

The method of claim 1, wherein the ionic liquid comprises at least one anion selected from chlorides; bromides; iodides; tetrafluoroborates; hexafluorophosphates; bis(trifluoromethylsulfonyl)imides; tris(pentafluoroethyl)trifluorophosphates (FAPs); trifluoromethanesulfonates; trifluoroacetates; methylsulfates; octylsulfates; thiocyanates; organoborates; and p-toluenesulfonates.

### Claim 10 (depends on 1)

The method of claim 1, wherein the ionic liquid is selected from 1-butyl-3-methylimidazolium hexafluorophosphate ([BMIM]PF6), 1-hexyl-3-methylimidazolium tetrafluoroborate ([HMIM]BF4), 1-butyl-3-methylimidazolium tetrafluoroborate ([BMIM]BF4), and 1-ethyl-3-methylimidazolium trifluoromethane sulfonamide ([EMIM] (CF3SO2)2N).

### Claim 11 (depends on 1)

The method of claim 1, wherein the ionic liquid has a viscosity no greater than 1115 cP at a temperature of 23° C.

### Claim 12 (depends on 1)

The method of claim 1, wherein the ionic liquid has a viscosity no greater than 1110 cP at a temperature of 23° C.

### Claim 13 (depends on 1)

The method of claim 1, wherein the depositing step is conducted by magnetron sputtering or electron beam evaporation.

### Claim 14 (depends on 1)

The method of claim 1, wherein the ionic liquid comprises a mixture of two or more ionic liquids.

### Claim 15 (depends on 3)

The method of claim 3, including reacting the monomers or polymers to form a polymeric material.

### Claim 16 (depends on 1)

The method of claim 1, wherein said ionic liquid comprises at least one cation selected from the group consisting of, substituted pyridiniums; substituted pyrrolidiniums; tetraalkyl phosphoniums; tetraalkyl ammoniums; guanidiniums; isouroniums; and thiouroniums.

### Claim 17

A method for forming a multilayered coating on an ionic liquid, comprising the steps of:
placing an ionic liquid on a substrate, thereby forming an ionic liquid coated substrate,
introducing said ionic liquid coated substrate into a deposition chamber having at least one physical deposition target; and
moving said ionic liquid coated substrate under the at least one physical vapor deposition target, thereby directing one or more materials onto the ionic liquid of the ionic liquid coated substrate by physical vapor deposition to form a multilayered coating on the ionic liquid of the ionic liquid coated substrate.

### Claim 18 (depends on 17)

The method of claim 17, including adjusting the viscosity of the ionic liquid by adding one or more polymers or monomers to the ionic liquid.

### Claim 19 (depends on 1)

A coating made by the method of claim 1.

### Claim 20 (depends on 17)

A coating made by the method of claim 17.