Sequential radial mirror analyser
AssigneeNational University of Singapore
InventorsAnjam KHURSHEED, Hung Quang Hoang
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Abstract
A sequential radial mirror analyser (RMA) (100) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen (112) is disclosed. The RMA comprises a 0V equipotential exit grid (116), and a plurality of electrodes (119, 120a, 120b, 120c) electrically configured to generate corresponding electrostatic fields for deflecting at least some of the charged particles of a single energy level to exit through the exit grid (116) to form a second-order focal point on a detector (106). The second-order focal point is associated with the single energy level, and the detector (106) is disposed external to the corresponding electrostatic fields. A related method is also disclosed.
Claims17
A sequential radial mirror analyser (RMA) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen, the RMA comprising:
- a 0V equipotential exit grid;
- and
- a plurality of electrodes electrically configured to generate corresponding electrostatic fields for deflecting at least some of the charged particles of a single energy level to exit through the exit grid to form a second-order focal point on a detector,
- wherein the second-order focal point is associated with the single energy level, and the detector is disposed external to the corresponding electrostatic fields.
Dependencies are inferred from the claim text.